12/6/2010	11:14:55 AM	Program started after a nonstandard shutdown
12/6/2010	11:14:56 AM	Helium valve closed
12/6/2010	11:14:56 AM	H2 valve closed
12/6/2010	11:14:56 AM	BCl3 valve closed
12/6/2010	11:14:56 AM	PH3 valve closed
12/6/2010	11:14:56 AM	SiCl4 pre valve closed
12/6/2010	11:14:56 AM	SiCl4 post valve closed
12/6/2010	11:14:56 AM	Main Vac valve closed
12/6/2010	11:14:56 AM	Bypass valve closed
12/6/2010	11:14:56 AM	Bubbler valve closed
12/6/2010	11:14:56 AM	Helium MFC set to  0.000000
12/6/2010	11:14:56 AM	H2 MFC set to  0.000000
12/6/2010	11:14:56 AM	BCl3 MFC set to  0.000000
12/6/2010	11:14:56 AM	PHl3 MFC set to  0.000000
12/6/2010	11:14:56 AM	SiCl4 MFC set to  0.000000
12/6/2010	11:14:56 AM	Bypass solenoid MFC set to  760.000000
12/6/2010	11:14:56 AM	Tube furnace set to 0
12/6/2010	11:15:08 AM	Helium MFC set to  250.000000
12/6/2010	11:15:13 AM	Helium valve opened
12/6/2010	11:15:27 AM	Helium valve closed
12/6/2010	11:15:35 AM	Helium valve opened
12/6/2010	11:15:41 AM	Helium valve closed
12/6/2010	11:16:34 AM	Helium valve opened
12/6/2010	11:16:37 AM	Helium valve closed
12/6/2010	11:16:50 AM	Helium valve opened
12/6/2010	11:16:51 AM	Helium valve closed
12/6/2010	11:18:25 AM	Helium valve opened
12/6/2010	11:18:40 AM	Helium valve closed
12/6/2010	11:19:08 AM	Bypass valve opened
12/6/2010	11:19:15 AM	Bypass valve closed
12/6/2010	11:19:16 AM	Bypass valve opened
12/6/2010	11:19:17 AM	Bypass valve closed
12/6/2010	11:19:19 AM	Bypass valve opened
12/6/2010	11:19:20 AM	Main Vac valve opened
12/6/2010	11:19:24 AM	Main Vac valve closed
12/6/2010	11:19:24 AM	Bypass valve closed
12/6/2010	11:19:26 AM	Helium valve opened
12/6/2010	11:19:45 AM	Helium valve closed
12/6/2010	11:19:53 AM	H2 MFC set to  50.000000
12/6/2010	11:19:56 AM	H2 valve opened
12/6/2010	11:20:04 AM	H2 valve closed
12/6/2010	11:20:33 AM	Helium valve opened
12/6/2010	11:21:07 AM	Helium valve closed
12/6/2010	11:21:46 AM	Helium valve opened
12/6/2010	11:21:53 AM	Helium MFC set to  50.000000
12/6/2010	11:22:02 AM	Helium MFC set to  250.000000
12/6/2010	11:22:15 AM	Helium valve closed
12/6/2010	11:24:07 AM	Helium valve opened
12/6/2010	11:24:09 AM	Helium valve closed
12/6/2010	11:24:39 AM	Helium valve opened
12/6/2010	11:24:44 AM	Helium valve closed
12/6/2010	11:28:27 AM	Program started after a nonstandard shutdown
12/6/2010	11:28:27 AM	Helium valve closed
12/6/2010	11:28:27 AM	H2 valve closed
12/6/2010	11:28:27 AM	BCl3 valve closed
12/6/2010	11:28:28 AM	PH3 valve closed
12/6/2010	11:28:28 AM	SiCl4 pre valve closed
12/6/2010	11:28:28 AM	SiCl4 post valve closed
12/6/2010	11:28:28 AM	Main Vac valve closed
12/6/2010	11:28:28 AM	Bypass valve closed
12/6/2010	11:28:28 AM	Bubbler valve closed
12/6/2010	11:28:28 AM	Helium MFC set to  0.000000
12/6/2010	11:28:28 AM	H2 MFC set to  0.000000
12/6/2010	11:28:28 AM	BCl3 MFC set to  0.000000
12/6/2010	11:28:28 AM	PHl3 MFC set to  0.000000
12/6/2010	11:28:28 AM	SiCl4 MFC set to  0.000000
12/6/2010	11:28:28 AM	Bypass solenoid MFC set to  760.000000
12/6/2010	11:28:28 AM	Tube furnace set to 0
12/6/2010	11:28:34 AM	Helium MFC set to  100.000000
12/6/2010	11:28:42 AM	Helium valve opened
12/6/2010	11:29:15 AM	Helium valve closed
12/6/2010	11:30:05 AM	Helium valve opened
12/6/2010	11:30:08 AM	Helium valve closed
12/6/2010	11:30:41 AM	H2 valve opened
12/6/2010	11:30:42 AM	H2 valve closed
12/6/2010	11:30:44 AM	Bypass valve opened
12/6/2010	11:30:48 AM	Main Vac valve opened
12/6/2010	11:30:50 AM	Main Vac valve closed
12/6/2010	11:30:51 AM	Bypass valve closed
12/6/2010	11:30:58 AM	Main Vac valve opened
12/6/2010	11:30:59 AM	Main Vac valve closed
12/6/2010	11:31:00 AM	Main Vac valve opened
12/6/2010	11:31:00 AM	Main Vac valve closed
12/6/2010	11:31:04 AM	Main Vac valve opened
12/6/2010	11:31:05 AM	Main Vac valve closed
12/6/2010	11:31:24 AM	Bypass valve opened
12/6/2010	11:31:24 AM	Bypass valve closed
12/6/2010	11:31:25 AM	Bypass valve opened
12/6/2010	11:31:26 AM	Bypass valve closed
12/6/2010	11:33:08 AM	Main Vac valve opened
12/6/2010	11:33:12 AM	Main Vac valve closed
12/6/2010	11:33:13 AM	Main Vac valve opened
12/6/2010	11:33:14 AM	Main Vac valve closed
12/6/2010	11:39:11 AM	Helium valve opened
12/6/2010	11:39:23 AM	Helium MFC set to  500.000000
12/6/2010	11:39:52 AM	Helium valve closed
12/6/2010	11:39:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	11:39:55 AM	Recipe started at 11:39 AM
12/6/2010	11:39:55 AM	H2 valve closed
12/6/2010	11:39:55 AM	BCl3 valve closed
12/6/2010	11:39:55 AM	PH3 valve closed
12/6/2010	11:39:55 AM	SiCl4 pre valve closed
12/6/2010	11:39:55 AM	SiCl4 post valve closed
12/6/2010	11:39:55 AM	Main Vac valve closed
12/6/2010	11:39:55 AM	Bypass valve closed
12/6/2010	11:39:55 AM	Bubbler valve closed
12/6/2010	11:39:55 AM	Helium valve opened
12/6/2010	11:39:55 AM	Helium MFC set to  500.000000
12/6/2010	11:39:55 AM	H2 MFC set to  0.000000
12/6/2010	11:39:55 AM	BCl3 MFC set to  0.000000
12/6/2010	11:39:55 AM	PHl3 MFC set to  0.000000
12/6/2010	11:39:55 AM	SiCl4 MFC set to  0.000000
12/6/2010	11:39:55 AM	Bypass solenoid MFC set to  0.000000
12/6/2010	11:39:55 AM	Tube furnace set to 0
12/6/2010	11:40:39 AM	Helium valve closed
12/6/2010	11:40:39 AM	H2 valve closed
12/6/2010	11:40:39 AM	BCl3 valve closed
12/6/2010	11:40:39 AM	PH3 valve closed
12/6/2010	11:40:39 AM	SiCl4 pre valve closed
12/6/2010	11:40:39 AM	SiCl4 post valve closed
12/6/2010	11:40:39 AM	Main Vac valve closed
12/6/2010	11:40:39 AM	Bypass valve closed
12/6/2010	11:40:39 AM	Bubbler valve closed
12/6/2010	11:40:39 AM	Helium MFC set to  0.000000
12/6/2010	11:40:39 AM	H2 MFC set to  0.000000
12/6/2010	11:40:39 AM	BCl3 MFC set to  0.000000
12/6/2010	11:40:39 AM	PHl3 MFC set to  0.000000
12/6/2010	11:40:39 AM	SiCl4 MFC set to  0.000000
12/6/2010	11:40:39 AM	Bypass solenoid MFC set to  0.000000
12/6/2010	11:40:39 AM	Tube furnace set to 0
12/6/2010	11:40:39 AM	Run finished at 11:40 AM
12/6/2010	11:40:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	11:41:03 AM	Helium MFC set to  100.000000
12/6/2010	11:41:07 AM	Helium valve opened
12/6/2010	11:41:13 AM	Bubbler valve opened
12/6/2010	11:43:45 AM	Bubbler valve closed
12/6/2010	11:43:54 AM	Helium valve closed
12/6/2010	11:44:10 AM	Helium valve opened
12/6/2010	11:44:13 AM	Bubbler valve opened
12/6/2010	11:45:23 AM	Bubbler valve closed
12/6/2010	11:45:26 AM	Helium valve closed
12/6/2010	12:08:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2010	12:08:44 PM	Recipe started at 12:08 PM
12/6/2010	12:08:44 PM	Helium valve closed
12/6/2010	12:08:44 PM	H2 valve closed
12/6/2010	12:08:44 PM	BCl3 valve closed
12/6/2010	12:08:44 PM	PH3 valve closed
12/6/2010	12:08:44 PM	SiCl4 pre valve closed
12/6/2010	12:08:44 PM	SiCl4 post valve closed
12/6/2010	12:08:44 PM	Main Vac valve closed
12/6/2010	12:08:44 PM	Bubbler valve closed
12/6/2010	12:08:44 PM	Bypass valve opened
12/6/2010	12:08:44 PM	Helium MFC set to  0.000000
12/6/2010	12:08:44 PM	H2 MFC set to  0.000000
12/6/2010	12:08:44 PM	BCl3 MFC set to  0.000000
12/6/2010	12:08:44 PM	PHl3 MFC set to  0.000000
12/6/2010	12:08:44 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:08:44 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:08:44 PM	Tube furnace set to 0
12/6/2010	12:09:38 PM	Helium valve closed
12/6/2010	12:09:38 PM	H2 valve closed
12/6/2010	12:09:38 PM	BCl3 valve closed
12/6/2010	12:09:38 PM	PH3 valve closed
12/6/2010	12:09:38 PM	SiCl4 pre valve closed
12/6/2010	12:09:38 PM	SiCl4 post valve closed
12/6/2010	12:09:38 PM	Bubbler valve closed
12/6/2010	12:09:38 PM	Main Vac valve opened
12/6/2010	12:09:38 PM	Bypass valve opened
12/6/2010	12:09:38 PM	Helium MFC set to  0.000000
12/6/2010	12:09:38 PM	H2 MFC set to  0.000000
12/6/2010	12:09:38 PM	BCl3 MFC set to  0.000000
12/6/2010	12:09:38 PM	PHl3 MFC set to  0.000000
12/6/2010	12:09:38 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:09:38 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:09:38 PM	Tube furnace set to 0
12/6/2010	12:09:38 PM	Run finished at 12:09 PM
12/6/2010	12:09:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2010	12:09:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	12:09:57 PM	Recipe started at 12:09 PM
12/6/2010	12:09:57 PM	Helium valve closed
12/6/2010	12:09:57 PM	H2 valve closed
12/6/2010	12:09:57 PM	BCl3 valve closed
12/6/2010	12:09:57 PM	PH3 valve closed
12/6/2010	12:09:57 PM	SiCl4 pre valve closed
12/6/2010	12:09:57 PM	SiCl4 post valve closed
12/6/2010	12:09:57 PM	Main Vac valve closed
12/6/2010	12:09:57 PM	Bubbler valve closed
12/6/2010	12:09:57 PM	Bypass valve opened
12/6/2010	12:09:57 PM	Helium MFC set to  0.000000
12/6/2010	12:09:57 PM	H2 MFC set to  0.000000
12/6/2010	12:09:57 PM	BCl3 MFC set to  0.000000
12/6/2010	12:09:57 PM	PHl3 MFC set to  0.000000
12/6/2010	12:09:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:09:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:09:57 PM	Tube furnace set to 0
12/6/2010	12:09:57 PM	Helium valve closed
12/6/2010	12:09:57 PM	H2 valve closed
12/6/2010	12:09:57 PM	BCl3 valve closed
12/6/2010	12:09:57 PM	PH3 valve closed
12/6/2010	12:09:57 PM	SiCl4 pre valve closed
12/6/2010	12:09:57 PM	SiCl4 post valve closed
12/6/2010	12:09:57 PM	Bubbler valve closed
12/6/2010	12:09:57 PM	Main Vac valve opened
12/6/2010	12:09:57 PM	Bypass valve opened
12/6/2010	12:09:57 PM	Helium MFC set to  0.000000
12/6/2010	12:09:57 PM	H2 MFC set to  0.000000
12/6/2010	12:09:57 PM	BCl3 MFC set to  0.000000
12/6/2010	12:09:57 PM	PHl3 MFC set to  0.000000
12/6/2010	12:09:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:09:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:09:58 PM	Tube furnace set to 0
12/6/2010	12:10:58 PM	H2 valve closed
12/6/2010	12:10:58 PM	BCl3 valve closed
12/6/2010	12:10:58 PM	PH3 valve closed
12/6/2010	12:10:58 PM	SiCl4 pre valve closed
12/6/2010	12:10:58 PM	SiCl4 post valve closed
12/6/2010	12:10:58 PM	Bubbler valve closed
12/6/2010	12:10:58 PM	Helium valve opened
12/6/2010	12:10:58 PM	Main Vac valve opened
12/6/2010	12:10:58 PM	Bypass valve opened
12/6/2010	12:10:58 PM	Helium MFC set to  100.000000
12/6/2010	12:10:58 PM	H2 MFC set to  0.000000
12/6/2010	12:10:58 PM	BCl3 MFC set to  0.000000
12/6/2010	12:10:58 PM	PHl3 MFC set to  0.000000
12/6/2010	12:10:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:10:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:10:58 PM	Tube furnace set to 0
12/6/2010	12:11:58 PM	Helium valve closed
12/6/2010	12:11:58 PM	H2 valve closed
12/6/2010	12:11:58 PM	BCl3 valve closed
12/6/2010	12:11:58 PM	PH3 valve closed
12/6/2010	12:11:58 PM	SiCl4 pre valve closed
12/6/2010	12:11:58 PM	SiCl4 post valve closed
12/6/2010	12:11:58 PM	Bubbler valve closed
12/6/2010	12:11:58 PM	Main Vac valve opened
12/6/2010	12:11:58 PM	Bypass valve opened
12/6/2010	12:11:58 PM	Helium MFC set to  0.000000
12/6/2010	12:11:58 PM	H2 MFC set to  0.000000
12/6/2010	12:11:58 PM	BCl3 MFC set to  0.000000
12/6/2010	12:11:58 PM	PHl3 MFC set to  0.000000
12/6/2010	12:11:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:11:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:11:58 PM	Tube furnace set to 0
12/6/2010	12:12:58 PM	H2 valve closed
12/6/2010	12:12:58 PM	BCl3 valve closed
12/6/2010	12:12:58 PM	PH3 valve closed
12/6/2010	12:12:58 PM	SiCl4 pre valve closed
12/6/2010	12:12:58 PM	SiCl4 post valve closed
12/6/2010	12:12:58 PM	Bubbler valve closed
12/6/2010	12:12:58 PM	Helium valve opened
12/6/2010	12:12:58 PM	Main Vac valve opened
12/6/2010	12:12:58 PM	Bypass valve opened
12/6/2010	12:12:58 PM	Helium MFC set to  100.000000
12/6/2010	12:12:58 PM	H2 MFC set to  0.000000
12/6/2010	12:12:58 PM	BCl3 MFC set to  0.000000
12/6/2010	12:12:58 PM	PHl3 MFC set to  0.000000
12/6/2010	12:12:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:12:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:12:58 PM	Tube furnace set to 0
12/6/2010	12:13:58 PM	Helium valve closed
12/6/2010	12:13:58 PM	H2 valve closed
12/6/2010	12:13:58 PM	BCl3 valve closed
12/6/2010	12:13:58 PM	PH3 valve closed
12/6/2010	12:13:58 PM	SiCl4 pre valve closed
12/6/2010	12:13:58 PM	SiCl4 post valve closed
12/6/2010	12:13:58 PM	Bubbler valve closed
12/6/2010	12:13:58 PM	Main Vac valve opened
12/6/2010	12:13:58 PM	Bypass valve opened
12/6/2010	12:13:58 PM	Helium MFC set to  0.000000
12/6/2010	12:13:58 PM	H2 MFC set to  0.000000
12/6/2010	12:13:58 PM	BCl3 MFC set to  0.000000
12/6/2010	12:13:58 PM	PHl3 MFC set to  0.000000
12/6/2010	12:13:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:13:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:13:58 PM	Tube furnace set to 0
12/6/2010	12:14:58 PM	H2 valve closed
12/6/2010	12:14:58 PM	BCl3 valve closed
12/6/2010	12:14:58 PM	PH3 valve closed
12/6/2010	12:14:58 PM	SiCl4 pre valve closed
12/6/2010	12:14:58 PM	SiCl4 post valve closed
12/6/2010	12:14:58 PM	Bubbler valve closed
12/6/2010	12:14:58 PM	Helium valve opened
12/6/2010	12:14:58 PM	Main Vac valve opened
12/6/2010	12:14:58 PM	Bypass valve opened
12/6/2010	12:14:58 PM	Helium MFC set to  100.000000
12/6/2010	12:14:58 PM	H2 MFC set to  0.000000
12/6/2010	12:14:58 PM	BCl3 MFC set to  0.000000
12/6/2010	12:14:58 PM	PHl3 MFC set to  0.000000
12/6/2010	12:14:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:14:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:14:59 PM	Tube furnace set to 0
12/6/2010	12:15:59 PM	Helium valve closed
12/6/2010	12:15:59 PM	H2 valve closed
12/6/2010	12:15:59 PM	BCl3 valve closed
12/6/2010	12:15:59 PM	PH3 valve closed
12/6/2010	12:15:59 PM	SiCl4 pre valve closed
12/6/2010	12:15:59 PM	SiCl4 post valve closed
12/6/2010	12:15:59 PM	Bubbler valve closed
12/6/2010	12:15:59 PM	Main Vac valve opened
12/6/2010	12:15:59 PM	Bypass valve opened
12/6/2010	12:15:59 PM	Helium MFC set to  0.000000
12/6/2010	12:15:59 PM	H2 MFC set to  0.000000
12/6/2010	12:15:59 PM	BCl3 MFC set to  0.000000
12/6/2010	12:15:59 PM	PHl3 MFC set to  0.000000
12/6/2010	12:15:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:15:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:15:59 PM	Tube furnace set to 0
12/6/2010	12:16:59 PM	H2 valve closed
12/6/2010	12:16:59 PM	BCl3 valve closed
12/6/2010	12:16:59 PM	PH3 valve closed
12/6/2010	12:16:59 PM	SiCl4 pre valve closed
12/6/2010	12:16:59 PM	SiCl4 post valve closed
12/6/2010	12:16:59 PM	Bubbler valve closed
12/6/2010	12:16:59 PM	Helium valve opened
12/6/2010	12:16:59 PM	Main Vac valve opened
12/6/2010	12:16:59 PM	Bypass valve opened
12/6/2010	12:16:59 PM	Helium MFC set to  100.000000
12/6/2010	12:16:59 PM	H2 MFC set to  0.000000
12/6/2010	12:16:59 PM	BCl3 MFC set to  0.000000
12/6/2010	12:16:59 PM	PHl3 MFC set to  0.000000
12/6/2010	12:16:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:16:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:16:59 PM	Tube furnace set to 0
12/6/2010	12:17:59 PM	Helium valve closed
12/6/2010	12:17:59 PM	H2 valve closed
12/6/2010	12:17:59 PM	BCl3 valve closed
12/6/2010	12:17:59 PM	PH3 valve closed
12/6/2010	12:17:59 PM	SiCl4 pre valve closed
12/6/2010	12:17:59 PM	SiCl4 post valve closed
12/6/2010	12:17:59 PM	Bubbler valve closed
12/6/2010	12:17:59 PM	Main Vac valve opened
12/6/2010	12:17:59 PM	Bypass valve opened
12/6/2010	12:17:59 PM	Helium MFC set to  0.000000
12/6/2010	12:17:59 PM	H2 MFC set to  0.000000
12/6/2010	12:17:59 PM	BCl3 MFC set to  0.000000
12/6/2010	12:17:59 PM	PHl3 MFC set to  0.000000
12/6/2010	12:17:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:17:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:17:59 PM	Tube furnace set to 0
12/6/2010	12:18:59 PM	H2 valve closed
12/6/2010	12:18:59 PM	BCl3 valve closed
12/6/2010	12:18:59 PM	PH3 valve closed
12/6/2010	12:18:59 PM	SiCl4 pre valve closed
12/6/2010	12:18:59 PM	SiCl4 post valve closed
12/6/2010	12:18:59 PM	Bubbler valve closed
12/6/2010	12:18:59 PM	Helium valve opened
12/6/2010	12:18:59 PM	Main Vac valve opened
12/6/2010	12:18:59 PM	Bypass valve opened
12/6/2010	12:18:59 PM	Helium MFC set to  100.000000
12/6/2010	12:18:59 PM	H2 MFC set to  0.000000
12/6/2010	12:18:59 PM	BCl3 MFC set to  0.000000
12/6/2010	12:18:59 PM	PHl3 MFC set to  0.000000
12/6/2010	12:18:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:18:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:18:59 PM	Tube furnace set to 0
12/6/2010	12:19:59 PM	Helium valve closed
12/6/2010	12:19:59 PM	H2 valve closed
12/6/2010	12:19:59 PM	BCl3 valve closed
12/6/2010	12:19:59 PM	PH3 valve closed
12/6/2010	12:19:59 PM	SiCl4 pre valve closed
12/6/2010	12:19:59 PM	SiCl4 post valve closed
12/6/2010	12:19:59 PM	Bubbler valve closed
12/6/2010	12:19:59 PM	Main Vac valve opened
12/6/2010	12:19:59 PM	Bypass valve opened
12/6/2010	12:19:59 PM	Helium MFC set to  0.000000
12/6/2010	12:19:59 PM	H2 MFC set to  0.000000
12/6/2010	12:19:59 PM	BCl3 MFC set to  0.000000
12/6/2010	12:19:59 PM	PHl3 MFC set to  0.000000
12/6/2010	12:19:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:19:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:19:59 PM	Tube furnace set to 0
12/6/2010	12:20:59 PM	H2 valve closed
12/6/2010	12:20:59 PM	BCl3 valve closed
12/6/2010	12:20:59 PM	PH3 valve closed
12/6/2010	12:20:59 PM	SiCl4 pre valve closed
12/6/2010	12:20:59 PM	SiCl4 post valve closed
12/6/2010	12:20:59 PM	Bubbler valve closed
12/6/2010	12:21:00 PM	Helium valve opened
12/6/2010	12:21:00 PM	Main Vac valve opened
12/6/2010	12:21:00 PM	Bypass valve opened
12/6/2010	12:21:00 PM	Helium MFC set to  100.000000
12/6/2010	12:21:00 PM	H2 MFC set to  0.000000
12/6/2010	12:21:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:21:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:21:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:21:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:21:00 PM	Tube furnace set to 0
12/6/2010	12:22:00 PM	Helium valve closed
12/6/2010	12:22:00 PM	H2 valve closed
12/6/2010	12:22:00 PM	BCl3 valve closed
12/6/2010	12:22:00 PM	PH3 valve closed
12/6/2010	12:22:00 PM	SiCl4 pre valve closed
12/6/2010	12:22:00 PM	SiCl4 post valve closed
12/6/2010	12:22:00 PM	Bubbler valve closed
12/6/2010	12:22:00 PM	Main Vac valve opened
12/6/2010	12:22:00 PM	Bypass valve opened
12/6/2010	12:22:00 PM	Helium MFC set to  0.000000
12/6/2010	12:22:00 PM	H2 MFC set to  0.000000
12/6/2010	12:22:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:22:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:22:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:22:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:22:00 PM	Tube furnace set to 0
12/6/2010	12:23:00 PM	H2 valve closed
12/6/2010	12:23:00 PM	BCl3 valve closed
12/6/2010	12:23:00 PM	PH3 valve closed
12/6/2010	12:23:00 PM	SiCl4 pre valve closed
12/6/2010	12:23:00 PM	SiCl4 post valve closed
12/6/2010	12:23:00 PM	Bubbler valve closed
12/6/2010	12:23:00 PM	Helium valve opened
12/6/2010	12:23:00 PM	Main Vac valve opened
12/6/2010	12:23:00 PM	Bypass valve opened
12/6/2010	12:23:00 PM	Helium MFC set to  100.000000
12/6/2010	12:23:00 PM	H2 MFC set to  0.000000
12/6/2010	12:23:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:23:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:23:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:23:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:23:00 PM	Tube furnace set to 0
12/6/2010	12:24:00 PM	Helium valve closed
12/6/2010	12:24:00 PM	H2 valve closed
12/6/2010	12:24:00 PM	BCl3 valve closed
12/6/2010	12:24:00 PM	PH3 valve closed
12/6/2010	12:24:00 PM	SiCl4 pre valve closed
12/6/2010	12:24:00 PM	SiCl4 post valve closed
12/6/2010	12:24:00 PM	Bubbler valve closed
12/6/2010	12:24:00 PM	Main Vac valve opened
12/6/2010	12:24:00 PM	Bypass valve opened
12/6/2010	12:24:00 PM	Helium MFC set to  0.000000
12/6/2010	12:24:00 PM	H2 MFC set to  0.000000
12/6/2010	12:24:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:24:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:24:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:24:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:24:00 PM	Tube furnace set to 0
12/6/2010	12:25:00 PM	H2 valve closed
12/6/2010	12:25:00 PM	BCl3 valve closed
12/6/2010	12:25:00 PM	PH3 valve closed
12/6/2010	12:25:00 PM	SiCl4 pre valve closed
12/6/2010	12:25:00 PM	SiCl4 post valve closed
12/6/2010	12:25:00 PM	Bubbler valve closed
12/6/2010	12:25:00 PM	Helium valve opened
12/6/2010	12:25:00 PM	Main Vac valve opened
12/6/2010	12:25:00 PM	Bypass valve opened
12/6/2010	12:25:00 PM	Helium MFC set to  100.000000
12/6/2010	12:25:00 PM	H2 MFC set to  0.000000
12/6/2010	12:25:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:25:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:25:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:25:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:25:00 PM	Tube furnace set to 0
12/6/2010	12:26:00 PM	Helium valve closed
12/6/2010	12:26:00 PM	H2 valve closed
12/6/2010	12:26:00 PM	BCl3 valve closed
12/6/2010	12:26:00 PM	PH3 valve closed
12/6/2010	12:26:00 PM	SiCl4 pre valve closed
12/6/2010	12:26:00 PM	SiCl4 post valve closed
12/6/2010	12:26:00 PM	Bubbler valve closed
12/6/2010	12:26:00 PM	Main Vac valve opened
12/6/2010	12:26:00 PM	Bypass valve opened
12/6/2010	12:26:00 PM	Helium MFC set to  0.000000
12/6/2010	12:26:00 PM	H2 MFC set to  0.000000
12/6/2010	12:26:00 PM	BCl3 MFC set to  0.000000
12/6/2010	12:26:00 PM	PHl3 MFC set to  0.000000
12/6/2010	12:26:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:26:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:26:01 PM	Tube furnace set to 0
12/6/2010	12:27:01 PM	H2 valve closed
12/6/2010	12:27:01 PM	BCl3 valve closed
12/6/2010	12:27:01 PM	PH3 valve closed
12/6/2010	12:27:01 PM	SiCl4 pre valve closed
12/6/2010	12:27:01 PM	SiCl4 post valve closed
12/6/2010	12:27:01 PM	Bubbler valve closed
12/6/2010	12:27:01 PM	Helium valve opened
12/6/2010	12:27:01 PM	Main Vac valve opened
12/6/2010	12:27:01 PM	Bypass valve opened
12/6/2010	12:27:01 PM	Helium MFC set to  100.000000
12/6/2010	12:27:01 PM	H2 MFC set to  0.000000
12/6/2010	12:27:01 PM	BCl3 MFC set to  0.000000
12/6/2010	12:27:01 PM	PHl3 MFC set to  0.000000
12/6/2010	12:27:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:27:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:27:01 PM	Tube furnace set to 0
12/6/2010	12:28:01 PM	Helium valve closed
12/6/2010	12:28:01 PM	H2 valve closed
12/6/2010	12:28:01 PM	BCl3 valve closed
12/6/2010	12:28:01 PM	PH3 valve closed
12/6/2010	12:28:01 PM	SiCl4 pre valve closed
12/6/2010	12:28:01 PM	SiCl4 post valve closed
12/6/2010	12:28:01 PM	Bubbler valve closed
12/6/2010	12:28:01 PM	Main Vac valve opened
12/6/2010	12:28:01 PM	Bypass valve opened
12/6/2010	12:28:01 PM	Helium MFC set to  0.000000
12/6/2010	12:28:01 PM	H2 MFC set to  0.000000
12/6/2010	12:28:01 PM	BCl3 MFC set to  0.000000
12/6/2010	12:28:01 PM	PHl3 MFC set to  0.000000
12/6/2010	12:28:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:28:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:28:01 PM	Tube furnace set to 0
12/6/2010	12:29:01 PM	H2 valve closed
12/6/2010	12:29:01 PM	BCl3 valve closed
12/6/2010	12:29:01 PM	PH3 valve closed
12/6/2010	12:29:01 PM	SiCl4 pre valve closed
12/6/2010	12:29:01 PM	SiCl4 post valve closed
12/6/2010	12:29:01 PM	Bubbler valve closed
12/6/2010	12:29:01 PM	Helium valve opened
12/6/2010	12:29:01 PM	Main Vac valve opened
12/6/2010	12:29:01 PM	Bypass valve opened
12/6/2010	12:29:01 PM	Helium MFC set to  100.000000
12/6/2010	12:29:01 PM	H2 MFC set to  0.000000
12/6/2010	12:29:01 PM	BCl3 MFC set to  0.000000
12/6/2010	12:29:01 PM	PHl3 MFC set to  0.000000
12/6/2010	12:29:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:29:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:29:01 PM	Tube furnace set to 0
12/6/2010	12:30:01 PM	Helium valve closed
12/6/2010	12:30:01 PM	H2 valve closed
12/6/2010	12:30:01 PM	BCl3 valve closed
12/6/2010	12:30:01 PM	PH3 valve closed
12/6/2010	12:30:01 PM	SiCl4 pre valve closed
12/6/2010	12:30:01 PM	SiCl4 post valve closed
12/6/2010	12:30:01 PM	Bubbler valve closed
12/6/2010	12:30:01 PM	Main Vac valve opened
12/6/2010	12:30:01 PM	Bypass valve opened
12/6/2010	12:30:01 PM	Helium MFC set to  0.000000
12/6/2010	12:30:01 PM	H2 MFC set to  0.000000
12/6/2010	12:30:01 PM	BCl3 MFC set to  0.000000
12/6/2010	12:30:01 PM	PHl3 MFC set to  0.000000
12/6/2010	12:30:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	12:30:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	12:30:01 PM	Tube furnace set to 0
12/6/2010	12:30:02 PM	Run finished at 12:30 PM
12/6/2010	12:30:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	1:09:07 PM	Bypass valve closed
12/6/2010	1:09:07 PM	Main Vac valve closed
12/6/2010	1:09:29 PM	Bypass valve opened
12/6/2010	1:09:31 PM	Main Vac valve opened
12/6/2010	1:10:52 PM	Recipe started at 1:10 PM
12/6/2010	1:10:52 PM	Helium valve closed
12/6/2010	1:10:52 PM	BCl3 valve closed
12/6/2010	1:10:52 PM	PH3 valve closed
12/6/2010	1:10:52 PM	SiCl4 pre valve closed
12/6/2010	1:10:52 PM	SiCl4 post valve closed
12/6/2010	1:10:52 PM	Main Vac valve closed
12/6/2010	1:10:52 PM	Bypass valve closed
12/6/2010	1:10:52 PM	Bubbler valve closed
12/6/2010	1:10:52 PM	H2 valve opened
12/6/2010	1:10:52 PM	Helium MFC set to  0.000000
12/6/2010	1:10:52 PM	H2 MFC set to  500.000000
12/6/2010	1:10:52 PM	BCl3 MFC set to  0.000000
12/6/2010	1:10:52 PM	PHl3 MFC set to  0.000000
12/6/2010	1:10:52 PM	SiCl4 MFC set to  0.000000
12/6/2010	1:10:52 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	1:10:52 PM	Tube furnace set to 100
12/6/2010	1:12:13 PM	Helium valve closed
12/6/2010	1:12:13 PM	BCl3 valve closed
12/6/2010	1:12:13 PM	PH3 valve closed
12/6/2010	1:12:13 PM	SiCl4 pre valve closed
12/6/2010	1:12:13 PM	SiCl4 post valve closed
12/6/2010	1:12:13 PM	Main Vac valve closed
12/6/2010	1:12:13 PM	Bypass valve closed
12/6/2010	1:12:13 PM	H2 valve opened
12/6/2010	1:12:13 PM	Bubbler valve opened
12/6/2010	1:12:13 PM	Helium MFC set to  0.000000
12/6/2010	1:12:13 PM	H2 MFC set to  500.000000
12/6/2010	1:12:13 PM	BCl3 MFC set to  0.000000
12/6/2010	1:12:13 PM	PHl3 MFC set to  0.000000
12/6/2010	1:12:13 PM	SiCl4 MFC set to  0.000000
12/6/2010	1:12:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	1:12:14 PM	Tube furnace set to 1000
12/6/2010	1:32:14 PM	Helium valve closed
12/6/2010	1:32:14 PM	PH3 valve closed
12/6/2010	1:32:14 PM	Main Vac valve closed
12/6/2010	1:32:14 PM	Bypass valve closed
12/6/2010	1:32:14 PM	H2 valve opened
12/6/2010	1:32:14 PM	BCl3 valve opened
12/6/2010	1:32:14 PM	SiCl4 pre valve opened
12/6/2010	1:32:14 PM	SiCl4 post valve opened
12/6/2010	1:32:14 PM	Bubbler valve opened
12/6/2010	1:32:14 PM	Helium MFC set to  0.000000
12/6/2010	1:32:14 PM	H2 MFC set to  500.000000
12/6/2010	1:32:14 PM	BCl3 MFC set to  10.000000
12/6/2010	1:32:14 PM	PHl3 MFC set to  0.000000
12/6/2010	1:32:14 PM	SiCl4 MFC set to  50.000000
12/6/2010	1:32:14 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	1:32:14 PM	Tube furnace set to 1000
12/6/2010	1:44:14 PM	H2 valve closed
12/6/2010	1:44:14 PM	BCl3 valve closed
12/6/2010	1:44:14 PM	PH3 valve closed
12/6/2010	1:44:14 PM	SiCl4 pre valve closed
12/6/2010	1:44:14 PM	SiCl4 post valve closed
12/6/2010	1:44:14 PM	Main Vac valve closed
12/6/2010	1:44:14 PM	Bypass valve closed
12/6/2010	1:44:14 PM	Helium valve opened
12/6/2010	1:44:14 PM	Bubbler valve opened
12/6/2010	1:44:14 PM	Helium MFC set to  500.000000
12/6/2010	1:44:14 PM	H2 MFC set to  0.000000
12/6/2010	1:44:14 PM	BCl3 MFC set to  0.000000
12/6/2010	1:44:14 PM	PHl3 MFC set to  0.000000
12/6/2010	1:44:14 PM	SiCl4 MFC set to  0.000000
12/6/2010	1:44:14 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	1:44:14 PM	Tube furnace set to 0
12/6/2010	2:04:14 PM	Helium valve closed
12/6/2010	2:04:14 PM	H2 valve closed
12/6/2010	2:04:14 PM	BCl3 valve closed
12/6/2010	2:04:14 PM	PH3 valve closed
12/6/2010	2:04:14 PM	SiCl4 pre valve closed
12/6/2010	2:04:14 PM	SiCl4 post valve closed
12/6/2010	2:04:14 PM	Main Vac valve closed
12/6/2010	2:04:14 PM	Bypass valve closed
12/6/2010	2:04:14 PM	Bubbler valve closed
12/6/2010	2:04:14 PM	Helium MFC set to  0.000000
12/6/2010	2:04:14 PM	H2 MFC set to  0.000000
12/6/2010	2:04:14 PM	BCl3 MFC set to  0.000000
12/6/2010	2:04:14 PM	PHl3 MFC set to  0.000000
12/6/2010	2:04:14 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:04:14 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:04:14 PM	Tube furnace set to 0
12/6/2010	2:04:14 PM	Run finished at 2:04 PM
12/6/2010	2:33:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	2:33:57 PM	Recipe started at 2:33 PM
12/6/2010	2:33:57 PM	Helium valve closed
12/6/2010	2:33:57 PM	H2 valve closed
12/6/2010	2:33:57 PM	BCl3 valve closed
12/6/2010	2:33:57 PM	PH3 valve closed
12/6/2010	2:33:57 PM	SiCl4 pre valve closed
12/6/2010	2:33:57 PM	SiCl4 post valve closed
12/6/2010	2:33:57 PM	Main Vac valve closed
12/6/2010	2:33:57 PM	Bubbler valve closed
12/6/2010	2:33:57 PM	Bypass valve opened
12/6/2010	2:33:57 PM	Helium MFC set to  0.000000
12/6/2010	2:33:57 PM	H2 MFC set to  0.000000
12/6/2010	2:33:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:33:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:33:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:33:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:33:57 PM	Tube furnace set to 0
12/6/2010	2:34:53 PM	Helium valve closed
12/6/2010	2:34:53 PM	H2 valve closed
12/6/2010	2:34:53 PM	BCl3 valve closed
12/6/2010	2:34:53 PM	PH3 valve closed
12/6/2010	2:34:53 PM	SiCl4 pre valve closed
12/6/2010	2:34:53 PM	SiCl4 post valve closed
12/6/2010	2:34:53 PM	Bubbler valve closed
12/6/2010	2:34:53 PM	Main Vac valve opened
12/6/2010	2:34:53 PM	Bypass valve opened
12/6/2010	2:34:53 PM	Helium MFC set to  0.000000
12/6/2010	2:34:53 PM	H2 MFC set to  0.000000
12/6/2010	2:34:53 PM	BCl3 MFC set to  0.000000
12/6/2010	2:34:53 PM	PHl3 MFC set to  0.000000
12/6/2010	2:34:53 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:34:53 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:34:54 PM	Tube furnace set to 0
12/6/2010	2:35:54 PM	H2 valve closed
12/6/2010	2:35:54 PM	BCl3 valve closed
12/6/2010	2:35:54 PM	PH3 valve closed
12/6/2010	2:35:54 PM	SiCl4 pre valve closed
12/6/2010	2:35:54 PM	SiCl4 post valve closed
12/6/2010	2:35:54 PM	Bubbler valve closed
12/6/2010	2:35:54 PM	Helium valve opened
12/6/2010	2:35:54 PM	Main Vac valve opened
12/6/2010	2:35:54 PM	Bypass valve opened
12/6/2010	2:35:54 PM	Helium MFC set to  100.000000
12/6/2010	2:35:54 PM	H2 MFC set to  0.000000
12/6/2010	2:35:54 PM	BCl3 MFC set to  0.000000
12/6/2010	2:35:54 PM	PHl3 MFC set to  0.000000
12/6/2010	2:35:54 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:35:54 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:35:54 PM	Tube furnace set to 0
12/6/2010	2:36:54 PM	Helium valve closed
12/6/2010	2:36:54 PM	H2 valve closed
12/6/2010	2:36:54 PM	BCl3 valve closed
12/6/2010	2:36:54 PM	PH3 valve closed
12/6/2010	2:36:54 PM	SiCl4 pre valve closed
12/6/2010	2:36:54 PM	SiCl4 post valve closed
12/6/2010	2:36:54 PM	Bubbler valve closed
12/6/2010	2:36:54 PM	Main Vac valve opened
12/6/2010	2:36:54 PM	Bypass valve opened
12/6/2010	2:36:54 PM	Helium MFC set to  0.000000
12/6/2010	2:36:54 PM	H2 MFC set to  0.000000
12/6/2010	2:36:54 PM	BCl3 MFC set to  0.000000
12/6/2010	2:36:54 PM	PHl3 MFC set to  0.000000
12/6/2010	2:36:54 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:36:54 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:36:54 PM	Tube furnace set to 0
12/6/2010	2:37:54 PM	H2 valve closed
12/6/2010	2:37:54 PM	BCl3 valve closed
12/6/2010	2:37:54 PM	PH3 valve closed
12/6/2010	2:37:54 PM	SiCl4 pre valve closed
12/6/2010	2:37:54 PM	SiCl4 post valve closed
12/6/2010	2:37:54 PM	Bubbler valve closed
12/6/2010	2:37:54 PM	Helium valve opened
12/6/2010	2:37:54 PM	Main Vac valve opened
12/6/2010	2:37:54 PM	Bypass valve opened
12/6/2010	2:37:54 PM	Helium MFC set to  100.000000
12/6/2010	2:37:54 PM	H2 MFC set to  0.000000
12/6/2010	2:37:54 PM	BCl3 MFC set to  0.000000
12/6/2010	2:37:54 PM	PHl3 MFC set to  0.000000
12/6/2010	2:37:54 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:37:54 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:37:54 PM	Tube furnace set to 0
12/6/2010	2:38:54 PM	Helium valve closed
12/6/2010	2:38:54 PM	H2 valve closed
12/6/2010	2:38:54 PM	BCl3 valve closed
12/6/2010	2:38:54 PM	PH3 valve closed
12/6/2010	2:38:54 PM	SiCl4 pre valve closed
12/6/2010	2:38:54 PM	SiCl4 post valve closed
12/6/2010	2:38:54 PM	Bubbler valve closed
12/6/2010	2:38:54 PM	Main Vac valve opened
12/6/2010	2:38:54 PM	Bypass valve opened
12/6/2010	2:38:54 PM	Helium MFC set to  0.000000
12/6/2010	2:38:54 PM	H2 MFC set to  0.000000
12/6/2010	2:38:54 PM	BCl3 MFC set to  0.000000
12/6/2010	2:38:54 PM	PHl3 MFC set to  0.000000
12/6/2010	2:38:54 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:38:54 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:38:54 PM	Tube furnace set to 0
12/6/2010	2:39:54 PM	H2 valve closed
12/6/2010	2:39:54 PM	BCl3 valve closed
12/6/2010	2:39:54 PM	PH3 valve closed
12/6/2010	2:39:54 PM	SiCl4 pre valve closed
12/6/2010	2:39:54 PM	SiCl4 post valve closed
12/6/2010	2:39:54 PM	Bubbler valve closed
12/6/2010	2:39:54 PM	Helium valve opened
12/6/2010	2:39:54 PM	Main Vac valve opened
12/6/2010	2:39:54 PM	Bypass valve opened
12/6/2010	2:39:54 PM	Helium MFC set to  100.000000
12/6/2010	2:39:54 PM	H2 MFC set to  0.000000
12/6/2010	2:39:54 PM	BCl3 MFC set to  0.000000
12/6/2010	2:39:54 PM	PHl3 MFC set to  0.000000
12/6/2010	2:39:54 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:39:54 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:39:55 PM	Tube furnace set to 0
12/6/2010	2:40:55 PM	Helium valve closed
12/6/2010	2:40:55 PM	H2 valve closed
12/6/2010	2:40:55 PM	BCl3 valve closed
12/6/2010	2:40:55 PM	PH3 valve closed
12/6/2010	2:40:55 PM	SiCl4 pre valve closed
12/6/2010	2:40:55 PM	SiCl4 post valve closed
12/6/2010	2:40:55 PM	Bubbler valve closed
12/6/2010	2:40:55 PM	Main Vac valve opened
12/6/2010	2:40:55 PM	Bypass valve opened
12/6/2010	2:40:55 PM	Helium MFC set to  0.000000
12/6/2010	2:40:55 PM	H2 MFC set to  0.000000
12/6/2010	2:40:55 PM	BCl3 MFC set to  0.000000
12/6/2010	2:40:55 PM	PHl3 MFC set to  0.000000
12/6/2010	2:40:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:40:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:40:55 PM	Tube furnace set to 0
12/6/2010	2:41:55 PM	H2 valve closed
12/6/2010	2:41:55 PM	BCl3 valve closed
12/6/2010	2:41:55 PM	PH3 valve closed
12/6/2010	2:41:55 PM	SiCl4 pre valve closed
12/6/2010	2:41:55 PM	SiCl4 post valve closed
12/6/2010	2:41:55 PM	Bubbler valve closed
12/6/2010	2:41:55 PM	Helium valve opened
12/6/2010	2:41:55 PM	Main Vac valve opened
12/6/2010	2:41:55 PM	Bypass valve opened
12/6/2010	2:41:55 PM	Helium MFC set to  100.000000
12/6/2010	2:41:55 PM	H2 MFC set to  0.000000
12/6/2010	2:41:55 PM	BCl3 MFC set to  0.000000
12/6/2010	2:41:55 PM	PHl3 MFC set to  0.000000
12/6/2010	2:41:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:41:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:41:55 PM	Tube furnace set to 0
12/6/2010	2:42:55 PM	Helium valve closed
12/6/2010	2:42:55 PM	H2 valve closed
12/6/2010	2:42:55 PM	BCl3 valve closed
12/6/2010	2:42:55 PM	PH3 valve closed
12/6/2010	2:42:55 PM	SiCl4 pre valve closed
12/6/2010	2:42:55 PM	SiCl4 post valve closed
12/6/2010	2:42:55 PM	Bubbler valve closed
12/6/2010	2:42:55 PM	Main Vac valve opened
12/6/2010	2:42:55 PM	Bypass valve opened
12/6/2010	2:42:55 PM	Helium MFC set to  0.000000
12/6/2010	2:42:55 PM	H2 MFC set to  0.000000
12/6/2010	2:42:55 PM	BCl3 MFC set to  0.000000
12/6/2010	2:42:55 PM	PHl3 MFC set to  0.000000
12/6/2010	2:42:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:42:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:42:55 PM	Tube furnace set to 0
12/6/2010	2:43:55 PM	H2 valve closed
12/6/2010	2:43:55 PM	BCl3 valve closed
12/6/2010	2:43:55 PM	PH3 valve closed
12/6/2010	2:43:55 PM	SiCl4 pre valve closed
12/6/2010	2:43:55 PM	SiCl4 post valve closed
12/6/2010	2:43:55 PM	Bubbler valve closed
12/6/2010	2:43:55 PM	Helium valve opened
12/6/2010	2:43:55 PM	Main Vac valve opened
12/6/2010	2:43:55 PM	Bypass valve opened
12/6/2010	2:43:55 PM	Helium MFC set to  100.000000
12/6/2010	2:43:55 PM	H2 MFC set to  0.000000
12/6/2010	2:43:55 PM	BCl3 MFC set to  0.000000
12/6/2010	2:43:55 PM	PHl3 MFC set to  0.000000
12/6/2010	2:43:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:43:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:43:55 PM	Tube furnace set to 0
12/6/2010	2:44:55 PM	Helium valve closed
12/6/2010	2:44:55 PM	H2 valve closed
12/6/2010	2:44:55 PM	BCl3 valve closed
12/6/2010	2:44:55 PM	PH3 valve closed
12/6/2010	2:44:55 PM	SiCl4 pre valve closed
12/6/2010	2:44:55 PM	SiCl4 post valve closed
12/6/2010	2:44:55 PM	Bubbler valve closed
12/6/2010	2:44:55 PM	Main Vac valve opened
12/6/2010	2:44:55 PM	Bypass valve opened
12/6/2010	2:44:55 PM	Helium MFC set to  0.000000
12/6/2010	2:44:55 PM	H2 MFC set to  0.000000
12/6/2010	2:44:55 PM	BCl3 MFC set to  0.000000
12/6/2010	2:44:55 PM	PHl3 MFC set to  0.000000
12/6/2010	2:44:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:44:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:44:56 PM	Tube furnace set to 0
12/6/2010	2:45:56 PM	H2 valve closed
12/6/2010	2:45:56 PM	BCl3 valve closed
12/6/2010	2:45:56 PM	PH3 valve closed
12/6/2010	2:45:56 PM	SiCl4 pre valve closed
12/6/2010	2:45:56 PM	SiCl4 post valve closed
12/6/2010	2:45:56 PM	Bubbler valve closed
12/6/2010	2:45:56 PM	Helium valve opened
12/6/2010	2:45:56 PM	Main Vac valve opened
12/6/2010	2:45:56 PM	Bypass valve opened
12/6/2010	2:45:56 PM	Helium MFC set to  100.000000
12/6/2010	2:45:56 PM	H2 MFC set to  0.000000
12/6/2010	2:45:56 PM	BCl3 MFC set to  0.000000
12/6/2010	2:45:56 PM	PHl3 MFC set to  0.000000
12/6/2010	2:45:56 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:45:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:45:56 PM	Tube furnace set to 0
12/6/2010	2:46:56 PM	Helium valve closed
12/6/2010	2:46:56 PM	H2 valve closed
12/6/2010	2:46:56 PM	BCl3 valve closed
12/6/2010	2:46:56 PM	PH3 valve closed
12/6/2010	2:46:56 PM	SiCl4 pre valve closed
12/6/2010	2:46:56 PM	SiCl4 post valve closed
12/6/2010	2:46:56 PM	Bubbler valve closed
12/6/2010	2:46:56 PM	Main Vac valve opened
12/6/2010	2:46:56 PM	Bypass valve opened
12/6/2010	2:46:56 PM	Helium MFC set to  0.000000
12/6/2010	2:46:56 PM	H2 MFC set to  0.000000
12/6/2010	2:46:56 PM	BCl3 MFC set to  0.000000
12/6/2010	2:46:56 PM	PHl3 MFC set to  0.000000
12/6/2010	2:46:56 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:46:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:46:56 PM	Tube furnace set to 0
12/6/2010	2:47:56 PM	H2 valve closed
12/6/2010	2:47:56 PM	BCl3 valve closed
12/6/2010	2:47:56 PM	PH3 valve closed
12/6/2010	2:47:56 PM	SiCl4 pre valve closed
12/6/2010	2:47:56 PM	SiCl4 post valve closed
12/6/2010	2:47:56 PM	Bubbler valve closed
12/6/2010	2:47:56 PM	Helium valve opened
12/6/2010	2:47:56 PM	Main Vac valve opened
12/6/2010	2:47:56 PM	Bypass valve opened
12/6/2010	2:47:56 PM	Helium MFC set to  100.000000
12/6/2010	2:47:56 PM	H2 MFC set to  0.000000
12/6/2010	2:47:56 PM	BCl3 MFC set to  0.000000
12/6/2010	2:47:56 PM	PHl3 MFC set to  0.000000
12/6/2010	2:47:56 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:47:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:47:56 PM	Tube furnace set to 0
12/6/2010	2:48:56 PM	Helium valve closed
12/6/2010	2:48:56 PM	H2 valve closed
12/6/2010	2:48:56 PM	BCl3 valve closed
12/6/2010	2:48:56 PM	PH3 valve closed
12/6/2010	2:48:56 PM	SiCl4 pre valve closed
12/6/2010	2:48:56 PM	SiCl4 post valve closed
12/6/2010	2:48:56 PM	Bubbler valve closed
12/6/2010	2:48:56 PM	Main Vac valve opened
12/6/2010	2:48:56 PM	Bypass valve opened
12/6/2010	2:48:56 PM	Helium MFC set to  0.000000
12/6/2010	2:48:56 PM	H2 MFC set to  0.000000
12/6/2010	2:48:56 PM	BCl3 MFC set to  0.000000
12/6/2010	2:48:56 PM	PHl3 MFC set to  0.000000
12/6/2010	2:48:56 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:48:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:48:56 PM	Tube furnace set to 0
12/6/2010	2:49:56 PM	H2 valve closed
12/6/2010	2:49:56 PM	BCl3 valve closed
12/6/2010	2:49:56 PM	PH3 valve closed
12/6/2010	2:49:56 PM	SiCl4 pre valve closed
12/6/2010	2:49:56 PM	SiCl4 post valve closed
12/6/2010	2:49:56 PM	Bubbler valve closed
12/6/2010	2:49:56 PM	Helium valve opened
12/6/2010	2:49:56 PM	Main Vac valve opened
12/6/2010	2:49:56 PM	Bypass valve opened
12/6/2010	2:49:56 PM	Helium MFC set to  100.000000
12/6/2010	2:49:56 PM	H2 MFC set to  0.000000
12/6/2010	2:49:56 PM	BCl3 MFC set to  0.000000
12/6/2010	2:49:56 PM	PHl3 MFC set to  0.000000
12/6/2010	2:49:56 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:49:56 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:49:57 PM	Tube furnace set to 0
12/6/2010	2:50:57 PM	Helium valve closed
12/6/2010	2:50:57 PM	H2 valve closed
12/6/2010	2:50:57 PM	BCl3 valve closed
12/6/2010	2:50:57 PM	PH3 valve closed
12/6/2010	2:50:57 PM	SiCl4 pre valve closed
12/6/2010	2:50:57 PM	SiCl4 post valve closed
12/6/2010	2:50:57 PM	Bubbler valve closed
12/6/2010	2:50:57 PM	Main Vac valve opened
12/6/2010	2:50:57 PM	Bypass valve opened
12/6/2010	2:50:57 PM	Helium MFC set to  0.000000
12/6/2010	2:50:57 PM	H2 MFC set to  0.000000
12/6/2010	2:50:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:50:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:50:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:50:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:50:57 PM	Tube furnace set to 0
12/6/2010	2:51:57 PM	H2 valve closed
12/6/2010	2:51:57 PM	BCl3 valve closed
12/6/2010	2:51:57 PM	PH3 valve closed
12/6/2010	2:51:57 PM	SiCl4 pre valve closed
12/6/2010	2:51:57 PM	SiCl4 post valve closed
12/6/2010	2:51:57 PM	Bubbler valve closed
12/6/2010	2:51:57 PM	Helium valve opened
12/6/2010	2:51:57 PM	Main Vac valve opened
12/6/2010	2:51:57 PM	Bypass valve opened
12/6/2010	2:51:57 PM	Helium MFC set to  100.000000
12/6/2010	2:51:57 PM	H2 MFC set to  0.000000
12/6/2010	2:51:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:51:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:51:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:51:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:51:57 PM	Tube furnace set to 0
12/6/2010	2:52:57 PM	Helium valve closed
12/6/2010	2:52:57 PM	H2 valve closed
12/6/2010	2:52:57 PM	BCl3 valve closed
12/6/2010	2:52:57 PM	PH3 valve closed
12/6/2010	2:52:57 PM	SiCl4 pre valve closed
12/6/2010	2:52:57 PM	SiCl4 post valve closed
12/6/2010	2:52:57 PM	Bubbler valve closed
12/6/2010	2:52:57 PM	Main Vac valve opened
12/6/2010	2:52:57 PM	Bypass valve opened
12/6/2010	2:52:57 PM	Helium MFC set to  0.000000
12/6/2010	2:52:57 PM	H2 MFC set to  0.000000
12/6/2010	2:52:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:52:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:52:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:52:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:52:57 PM	Tube furnace set to 0
12/6/2010	2:53:57 PM	H2 valve closed
12/6/2010	2:53:57 PM	BCl3 valve closed
12/6/2010	2:53:57 PM	PH3 valve closed
12/6/2010	2:53:57 PM	SiCl4 pre valve closed
12/6/2010	2:53:57 PM	SiCl4 post valve closed
12/6/2010	2:53:57 PM	Bubbler valve closed
12/6/2010	2:53:57 PM	Helium valve opened
12/6/2010	2:53:57 PM	Main Vac valve opened
12/6/2010	2:53:57 PM	Bypass valve opened
12/6/2010	2:53:57 PM	Helium MFC set to  100.000000
12/6/2010	2:53:57 PM	H2 MFC set to  0.000000
12/6/2010	2:53:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:53:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:53:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:53:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:53:57 PM	Tube furnace set to 0
12/6/2010	2:54:57 PM	Helium valve closed
12/6/2010	2:54:57 PM	H2 valve closed
12/6/2010	2:54:57 PM	BCl3 valve closed
12/6/2010	2:54:57 PM	PH3 valve closed
12/6/2010	2:54:57 PM	SiCl4 pre valve closed
12/6/2010	2:54:57 PM	SiCl4 post valve closed
12/6/2010	2:54:57 PM	Bubbler valve closed
12/6/2010	2:54:57 PM	Main Vac valve opened
12/6/2010	2:54:57 PM	Bypass valve opened
12/6/2010	2:54:57 PM	Helium MFC set to  0.000000
12/6/2010	2:54:57 PM	H2 MFC set to  0.000000
12/6/2010	2:54:57 PM	BCl3 MFC set to  0.000000
12/6/2010	2:54:57 PM	PHl3 MFC set to  0.000000
12/6/2010	2:54:57 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:54:57 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:54:58 PM	Tube furnace set to 0
12/6/2010	2:54:59 PM	Run finished at 2:54 PM
12/6/2010	2:54:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	2:56:12 PM	Main Vac valve closed
12/6/2010	2:56:16 PM	Bypass valve closed
12/6/2010	2:56:29 PM	Bypass valve opened
12/6/2010	2:56:29 PM	Main Vac valve opened
12/6/2010	2:57:55 PM	Main Vac valve closed
12/6/2010	2:57:56 PM	Bypass valve closed
12/6/2010	2:58:19 PM	Bypass valve opened
12/6/2010	2:58:20 PM	Main Vac valve opened
12/6/2010	2:59:13 PM	Recipe started at 2:59 PM
12/6/2010	2:59:13 PM	Helium valve closed
12/6/2010	2:59:13 PM	BCl3 valve closed
12/6/2010	2:59:13 PM	PH3 valve closed
12/6/2010	2:59:13 PM	SiCl4 pre valve closed
12/6/2010	2:59:13 PM	SiCl4 post valve closed
12/6/2010	2:59:13 PM	Main Vac valve closed
12/6/2010	2:59:13 PM	Bypass valve closed
12/6/2010	2:59:13 PM	Bubbler valve closed
12/6/2010	2:59:13 PM	H2 valve opened
12/6/2010	2:59:13 PM	Helium MFC set to  0.000000
12/6/2010	2:59:13 PM	H2 MFC set to  500.000000
12/6/2010	2:59:13 PM	BCl3 MFC set to  0.000000
12/6/2010	2:59:13 PM	PHl3 MFC set to  0.000000
12/6/2010	2:59:13 PM	SiCl4 MFC set to  0.000000
12/6/2010	2:59:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	2:59:13 PM	Tube furnace set to 100
12/6/2010	3:00:33 PM	Helium valve closed
12/6/2010	3:00:33 PM	BCl3 valve closed
12/6/2010	3:00:33 PM	PH3 valve closed
12/6/2010	3:00:33 PM	SiCl4 pre valve closed
12/6/2010	3:00:33 PM	SiCl4 post valve closed
12/6/2010	3:00:33 PM	Main Vac valve closed
12/6/2010	3:00:33 PM	Bypass valve closed
12/6/2010	3:00:33 PM	H2 valve opened
12/6/2010	3:00:33 PM	Bubbler valve opened
12/6/2010	3:00:33 PM	Helium MFC set to  0.000000
12/6/2010	3:00:33 PM	H2 MFC set to  500.000000
12/6/2010	3:00:33 PM	BCl3 MFC set to  0.000000
12/6/2010	3:00:33 PM	PHl3 MFC set to  0.000000
12/6/2010	3:00:33 PM	SiCl4 MFC set to  0.000000
12/6/2010	3:00:33 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	3:00:33 PM	Tube furnace set to 1000
12/6/2010	3:20:33 PM	Helium valve closed
12/6/2010	3:20:33 PM	PH3 valve closed
12/6/2010	3:20:33 PM	Main Vac valve closed
12/6/2010	3:20:33 PM	Bypass valve closed
12/6/2010	3:20:33 PM	H2 valve opened
12/6/2010	3:20:33 PM	BCl3 valve opened
12/6/2010	3:20:33 PM	SiCl4 pre valve opened
12/6/2010	3:20:33 PM	SiCl4 post valve opened
12/6/2010	3:20:33 PM	Bubbler valve opened
12/6/2010	3:20:33 PM	Helium MFC set to  0.000000
12/6/2010	3:20:33 PM	H2 MFC set to  500.000000
12/6/2010	3:20:33 PM	BCl3 MFC set to  10.000000
12/6/2010	3:20:33 PM	PHl3 MFC set to  0.000000
12/6/2010	3:20:33 PM	SiCl4 MFC set to  50.000000
12/6/2010	3:20:33 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	3:20:34 PM	Tube furnace set to 1000
12/6/2010	3:32:34 PM	H2 valve closed
12/6/2010	3:32:34 PM	BCl3 valve closed
12/6/2010	3:32:34 PM	PH3 valve closed
12/6/2010	3:32:34 PM	SiCl4 pre valve closed
12/6/2010	3:32:34 PM	SiCl4 post valve closed
12/6/2010	3:32:34 PM	Main Vac valve closed
12/6/2010	3:32:34 PM	Bypass valve closed
12/6/2010	3:32:34 PM	Helium valve opened
12/6/2010	3:32:34 PM	Bubbler valve opened
12/6/2010	3:32:34 PM	Helium MFC set to  500.000000
12/6/2010	3:32:34 PM	H2 MFC set to  0.000000
12/6/2010	3:32:34 PM	BCl3 MFC set to  0.000000
12/6/2010	3:32:34 PM	PHl3 MFC set to  0.000000
12/6/2010	3:32:34 PM	SiCl4 MFC set to  0.000000
12/6/2010	3:32:34 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	3:32:34 PM	Tube furnace set to 0
12/6/2010	3:52:34 PM	Helium valve closed
12/6/2010	3:52:34 PM	H2 valve closed
12/6/2010	3:52:34 PM	BCl3 valve closed
12/6/2010	3:52:34 PM	PH3 valve closed
12/6/2010	3:52:34 PM	SiCl4 pre valve closed
12/6/2010	3:52:34 PM	SiCl4 post valve closed
12/6/2010	3:52:34 PM	Main Vac valve closed
12/6/2010	3:52:34 PM	Bypass valve closed
12/6/2010	3:52:34 PM	Bubbler valve closed
12/6/2010	3:52:34 PM	Helium MFC set to  0.000000
12/6/2010	3:52:34 PM	H2 MFC set to  0.000000
12/6/2010	3:52:34 PM	BCl3 MFC set to  0.000000
12/6/2010	3:52:34 PM	PHl3 MFC set to  0.000000
12/6/2010	3:52:34 PM	SiCl4 MFC set to  0.000000
12/6/2010	3:52:34 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	3:52:34 PM	Tube furnace set to 0
12/6/2010	3:52:34 PM	Run finished at 3:52 PM
12/6/2010	4:09:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	4:09:27 PM	Recipe started at 4:09 PM
12/6/2010	4:09:27 PM	H2 valve closed
12/6/2010	4:09:27 PM	BCl3 valve closed
12/6/2010	4:09:27 PM	PH3 valve closed
12/6/2010	4:09:27 PM	SiCl4 pre valve closed
12/6/2010	4:09:27 PM	SiCl4 post valve closed
12/6/2010	4:09:27 PM	Main Vac valve closed
12/6/2010	4:09:27 PM	Bypass valve closed
12/6/2010	4:09:27 PM	Bubbler valve closed
12/6/2010	4:09:27 PM	Helium valve opened
12/6/2010	4:09:27 PM	Helium MFC set to  500.000000
12/6/2010	4:09:27 PM	H2 MFC set to  0.000000
12/6/2010	4:09:27 PM	BCl3 MFC set to  0.000000
12/6/2010	4:09:27 PM	PHl3 MFC set to  0.000000
12/6/2010	4:09:27 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:09:27 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:09:27 PM	Tube furnace set to 0
12/6/2010	4:09:34 PM	Helium valve closed
12/6/2010	4:09:34 PM	H2 valve closed
12/6/2010	4:09:34 PM	BCl3 valve closed
12/6/2010	4:09:34 PM	PH3 valve closed
12/6/2010	4:09:34 PM	SiCl4 pre valve closed
12/6/2010	4:09:34 PM	SiCl4 post valve closed
12/6/2010	4:09:34 PM	Main Vac valve closed
12/6/2010	4:09:34 PM	Bypass valve closed
12/6/2010	4:09:34 PM	Bubbler valve closed
12/6/2010	4:09:34 PM	Helium MFC set to  0.000000
12/6/2010	4:09:34 PM	H2 MFC set to  0.000000
12/6/2010	4:09:34 PM	BCl3 MFC set to  0.000000
12/6/2010	4:09:34 PM	PHl3 MFC set to  0.000000
12/6/2010	4:09:34 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:09:34 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:09:34 PM	Tube furnace set to 0
12/6/2010	4:09:34 PM	Run finished at 4:09 PM
12/6/2010	4:09:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	4:18:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	4:18:22 PM	Recipe started at 4:18 PM
12/6/2010	4:18:22 PM	Helium valve closed
12/6/2010	4:18:22 PM	H2 valve closed
12/6/2010	4:18:22 PM	BCl3 valve closed
12/6/2010	4:18:22 PM	PH3 valve closed
12/6/2010	4:18:22 PM	SiCl4 pre valve closed
12/6/2010	4:18:22 PM	SiCl4 post valve closed
12/6/2010	4:18:22 PM	Main Vac valve closed
12/6/2010	4:18:22 PM	Bubbler valve closed
12/6/2010	4:18:23 PM	Bypass valve opened
12/6/2010	4:18:23 PM	Helium MFC set to  0.000000
12/6/2010	4:18:23 PM	H2 MFC set to  0.000000
12/6/2010	4:18:23 PM	BCl3 MFC set to  0.000000
12/6/2010	4:18:23 PM	PHl3 MFC set to  0.000000
12/6/2010	4:18:23 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:18:23 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:18:23 PM	Tube furnace set to 0
12/6/2010	4:19:18 PM	Helium valve closed
12/6/2010	4:19:18 PM	H2 valve closed
12/6/2010	4:19:18 PM	BCl3 valve closed
12/6/2010	4:19:18 PM	PH3 valve closed
12/6/2010	4:19:18 PM	SiCl4 pre valve closed
12/6/2010	4:19:18 PM	SiCl4 post valve closed
12/6/2010	4:19:18 PM	Bubbler valve closed
12/6/2010	4:19:18 PM	Main Vac valve opened
12/6/2010	4:19:18 PM	Bypass valve opened
12/6/2010	4:19:18 PM	Helium MFC set to  0.000000
12/6/2010	4:19:18 PM	H2 MFC set to  0.000000
12/6/2010	4:19:18 PM	BCl3 MFC set to  0.000000
12/6/2010	4:19:18 PM	PHl3 MFC set to  0.000000
12/6/2010	4:19:18 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:19:18 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:19:18 PM	Tube furnace set to 0
12/6/2010	4:20:18 PM	H2 valve closed
12/6/2010	4:20:18 PM	BCl3 valve closed
12/6/2010	4:20:18 PM	PH3 valve closed
12/6/2010	4:20:18 PM	SiCl4 pre valve closed
12/6/2010	4:20:18 PM	SiCl4 post valve closed
12/6/2010	4:20:18 PM	Bubbler valve closed
12/6/2010	4:20:18 PM	Helium valve opened
12/6/2010	4:20:18 PM	Main Vac valve opened
12/6/2010	4:20:18 PM	Bypass valve opened
12/6/2010	4:20:18 PM	Helium MFC set to  100.000000
12/6/2010	4:20:18 PM	H2 MFC set to  0.000000
12/6/2010	4:20:18 PM	BCl3 MFC set to  0.000000
12/6/2010	4:20:18 PM	PHl3 MFC set to  0.000000
12/6/2010	4:20:18 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:20:18 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:20:18 PM	Tube furnace set to 0
12/6/2010	4:21:18 PM	Helium valve closed
12/6/2010	4:21:18 PM	H2 valve closed
12/6/2010	4:21:18 PM	BCl3 valve closed
12/6/2010	4:21:18 PM	PH3 valve closed
12/6/2010	4:21:18 PM	SiCl4 pre valve closed
12/6/2010	4:21:18 PM	SiCl4 post valve closed
12/6/2010	4:21:18 PM	Bubbler valve closed
12/6/2010	4:21:18 PM	Main Vac valve opened
12/6/2010	4:21:18 PM	Bypass valve opened
12/6/2010	4:21:18 PM	Helium MFC set to  0.000000
12/6/2010	4:21:18 PM	H2 MFC set to  0.000000
12/6/2010	4:21:18 PM	BCl3 MFC set to  0.000000
12/6/2010	4:21:18 PM	PHl3 MFC set to  0.000000
12/6/2010	4:21:18 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:21:18 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:21:18 PM	Tube furnace set to 0
12/6/2010	4:22:19 PM	H2 valve closed
12/6/2010	4:22:19 PM	BCl3 valve closed
12/6/2010	4:22:19 PM	PH3 valve closed
12/6/2010	4:22:19 PM	SiCl4 pre valve closed
12/6/2010	4:22:19 PM	SiCl4 post valve closed
12/6/2010	4:22:19 PM	Bubbler valve closed
12/6/2010	4:22:19 PM	Helium valve opened
12/6/2010	4:22:19 PM	Main Vac valve opened
12/6/2010	4:22:19 PM	Bypass valve opened
12/6/2010	4:22:19 PM	Helium MFC set to  100.000000
12/6/2010	4:22:19 PM	H2 MFC set to  0.000000
12/6/2010	4:22:19 PM	BCl3 MFC set to  0.000000
12/6/2010	4:22:19 PM	PHl3 MFC set to  0.000000
12/6/2010	4:22:19 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:22:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:22:19 PM	Tube furnace set to 0
12/6/2010	4:23:19 PM	Helium valve closed
12/6/2010	4:23:19 PM	H2 valve closed
12/6/2010	4:23:19 PM	BCl3 valve closed
12/6/2010	4:23:19 PM	PH3 valve closed
12/6/2010	4:23:19 PM	SiCl4 pre valve closed
12/6/2010	4:23:19 PM	SiCl4 post valve closed
12/6/2010	4:23:19 PM	Bubbler valve closed
12/6/2010	4:23:19 PM	Main Vac valve opened
12/6/2010	4:23:19 PM	Bypass valve opened
12/6/2010	4:23:19 PM	Helium MFC set to  0.000000
12/6/2010	4:23:19 PM	H2 MFC set to  0.000000
12/6/2010	4:23:19 PM	BCl3 MFC set to  0.000000
12/6/2010	4:23:19 PM	PHl3 MFC set to  0.000000
12/6/2010	4:23:19 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:23:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:23:19 PM	Tube furnace set to 0
12/6/2010	4:24:19 PM	H2 valve closed
12/6/2010	4:24:19 PM	BCl3 valve closed
12/6/2010	4:24:19 PM	PH3 valve closed
12/6/2010	4:24:19 PM	SiCl4 pre valve closed
12/6/2010	4:24:19 PM	SiCl4 post valve closed
12/6/2010	4:24:19 PM	Bubbler valve closed
12/6/2010	4:24:19 PM	Helium valve opened
12/6/2010	4:24:19 PM	Main Vac valve opened
12/6/2010	4:24:19 PM	Bypass valve opened
12/6/2010	4:24:19 PM	Helium MFC set to  100.000000
12/6/2010	4:24:19 PM	H2 MFC set to  0.000000
12/6/2010	4:24:19 PM	BCl3 MFC set to  0.000000
12/6/2010	4:24:19 PM	PHl3 MFC set to  0.000000
12/6/2010	4:24:19 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:24:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:24:19 PM	Tube furnace set to 0
12/6/2010	4:25:19 PM	Helium valve closed
12/6/2010	4:25:19 PM	H2 valve closed
12/6/2010	4:25:19 PM	BCl3 valve closed
12/6/2010	4:25:19 PM	PH3 valve closed
12/6/2010	4:25:19 PM	SiCl4 pre valve closed
12/6/2010	4:25:19 PM	SiCl4 post valve closed
12/6/2010	4:25:19 PM	Bubbler valve closed
12/6/2010	4:25:19 PM	Main Vac valve opened
12/6/2010	4:25:19 PM	Bypass valve opened
12/6/2010	4:25:19 PM	Helium MFC set to  0.000000
12/6/2010	4:25:19 PM	H2 MFC set to  0.000000
12/6/2010	4:25:19 PM	BCl3 MFC set to  0.000000
12/6/2010	4:25:19 PM	PHl3 MFC set to  0.000000
12/6/2010	4:25:19 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:25:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:25:19 PM	Tube furnace set to 0
12/6/2010	4:26:19 PM	H2 valve closed
12/6/2010	4:26:19 PM	BCl3 valve closed
12/6/2010	4:26:19 PM	PH3 valve closed
12/6/2010	4:26:19 PM	SiCl4 pre valve closed
12/6/2010	4:26:19 PM	SiCl4 post valve closed
12/6/2010	4:26:19 PM	Bubbler valve closed
12/6/2010	4:26:19 PM	Helium valve opened
12/6/2010	4:26:19 PM	Main Vac valve opened
12/6/2010	4:26:19 PM	Bypass valve opened
12/6/2010	4:26:19 PM	Helium MFC set to  100.000000
12/6/2010	4:26:19 PM	H2 MFC set to  0.000000
12/6/2010	4:26:19 PM	BCl3 MFC set to  0.000000
12/6/2010	4:26:19 PM	PHl3 MFC set to  0.000000
12/6/2010	4:26:19 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:26:19 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:26:19 PM	Tube furnace set to 0
12/6/2010	4:27:19 PM	Helium valve closed
12/6/2010	4:27:19 PM	H2 valve closed
12/6/2010	4:27:19 PM	BCl3 valve closed
12/6/2010	4:27:19 PM	PH3 valve closed
12/6/2010	4:27:19 PM	SiCl4 pre valve closed
12/6/2010	4:27:19 PM	SiCl4 post valve closed
12/6/2010	4:27:19 PM	Bubbler valve closed
12/6/2010	4:27:19 PM	Main Vac valve opened
12/6/2010	4:27:19 PM	Bypass valve opened
12/6/2010	4:27:19 PM	Helium MFC set to  0.000000
12/6/2010	4:27:20 PM	H2 MFC set to  0.000000
12/6/2010	4:27:20 PM	BCl3 MFC set to  0.000000
12/6/2010	4:27:20 PM	PHl3 MFC set to  0.000000
12/6/2010	4:27:20 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:27:20 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:27:20 PM	Tube furnace set to 0
12/6/2010	4:28:20 PM	H2 valve closed
12/6/2010	4:28:20 PM	BCl3 valve closed
12/6/2010	4:28:20 PM	PH3 valve closed
12/6/2010	4:28:20 PM	SiCl4 pre valve closed
12/6/2010	4:28:20 PM	SiCl4 post valve closed
12/6/2010	4:28:20 PM	Bubbler valve closed
12/6/2010	4:28:20 PM	Helium valve opened
12/6/2010	4:28:20 PM	Main Vac valve opened
12/6/2010	4:28:20 PM	Bypass valve opened
12/6/2010	4:28:20 PM	Helium MFC set to  100.000000
12/6/2010	4:28:20 PM	H2 MFC set to  0.000000
12/6/2010	4:28:20 PM	BCl3 MFC set to  0.000000
12/6/2010	4:28:20 PM	PHl3 MFC set to  0.000000
12/6/2010	4:28:20 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:28:20 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:28:20 PM	Tube furnace set to 0
12/6/2010	4:29:20 PM	Helium valve closed
12/6/2010	4:29:20 PM	H2 valve closed
12/6/2010	4:29:20 PM	BCl3 valve closed
12/6/2010	4:29:20 PM	PH3 valve closed
12/6/2010	4:29:20 PM	SiCl4 pre valve closed
12/6/2010	4:29:20 PM	SiCl4 post valve closed
12/6/2010	4:29:20 PM	Bubbler valve closed
12/6/2010	4:29:20 PM	Main Vac valve opened
12/6/2010	4:29:20 PM	Bypass valve opened
12/6/2010	4:29:20 PM	Helium MFC set to  0.000000
12/6/2010	4:29:20 PM	H2 MFC set to  0.000000
12/6/2010	4:29:20 PM	BCl3 MFC set to  0.000000
12/6/2010	4:29:20 PM	PHl3 MFC set to  0.000000
12/6/2010	4:29:20 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:29:20 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:29:20 PM	Tube furnace set to 0
12/6/2010	4:30:20 PM	H2 valve closed
12/6/2010	4:30:20 PM	BCl3 valve closed
12/6/2010	4:30:20 PM	PH3 valve closed
12/6/2010	4:30:20 PM	SiCl4 pre valve closed
12/6/2010	4:30:20 PM	SiCl4 post valve closed
12/6/2010	4:30:20 PM	Bubbler valve closed
12/6/2010	4:30:20 PM	Helium valve opened
12/6/2010	4:30:20 PM	Main Vac valve opened
12/6/2010	4:30:20 PM	Bypass valve opened
12/6/2010	4:30:20 PM	Helium MFC set to  100.000000
12/6/2010	4:30:20 PM	H2 MFC set to  0.000000
12/6/2010	4:30:20 PM	BCl3 MFC set to  0.000000
12/6/2010	4:30:20 PM	PHl3 MFC set to  0.000000
12/6/2010	4:30:20 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:30:20 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:30:20 PM	Tube furnace set to 0
12/6/2010	4:31:20 PM	Helium valve closed
12/6/2010	4:31:20 PM	H2 valve closed
12/6/2010	4:31:20 PM	BCl3 valve closed
12/6/2010	4:31:20 PM	PH3 valve closed
12/6/2010	4:31:20 PM	SiCl4 pre valve closed
12/6/2010	4:31:20 PM	SiCl4 post valve closed
12/6/2010	4:31:20 PM	Bubbler valve closed
12/6/2010	4:31:20 PM	Main Vac valve opened
12/6/2010	4:31:20 PM	Bypass valve opened
12/6/2010	4:31:20 PM	Helium MFC set to  0.000000
12/6/2010	4:31:20 PM	H2 MFC set to  0.000000
12/6/2010	4:31:20 PM	BCl3 MFC set to  0.000000
12/6/2010	4:31:20 PM	PHl3 MFC set to  0.000000
12/6/2010	4:31:20 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:31:20 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:31:20 PM	Tube furnace set to 0
12/6/2010	4:32:20 PM	H2 valve closed
12/6/2010	4:32:20 PM	BCl3 valve closed
12/6/2010	4:32:20 PM	PH3 valve closed
12/6/2010	4:32:20 PM	SiCl4 pre valve closed
12/6/2010	4:32:20 PM	SiCl4 post valve closed
12/6/2010	4:32:20 PM	Bubbler valve closed
12/6/2010	4:32:20 PM	Helium valve opened
12/6/2010	4:32:20 PM	Main Vac valve opened
12/6/2010	4:32:20 PM	Bypass valve opened
12/6/2010	4:32:20 PM	Helium MFC set to  100.000000
12/6/2010	4:32:20 PM	H2 MFC set to  0.000000
12/6/2010	4:32:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:32:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:32:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:32:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:32:21 PM	Tube furnace set to 0
12/6/2010	4:33:21 PM	Helium valve closed
12/6/2010	4:33:21 PM	H2 valve closed
12/6/2010	4:33:21 PM	BCl3 valve closed
12/6/2010	4:33:21 PM	PH3 valve closed
12/6/2010	4:33:21 PM	SiCl4 pre valve closed
12/6/2010	4:33:21 PM	SiCl4 post valve closed
12/6/2010	4:33:21 PM	Bubbler valve closed
12/6/2010	4:33:21 PM	Main Vac valve opened
12/6/2010	4:33:21 PM	Bypass valve opened
12/6/2010	4:33:21 PM	Helium MFC set to  0.000000
12/6/2010	4:33:21 PM	H2 MFC set to  0.000000
12/6/2010	4:33:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:33:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:33:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:33:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:33:21 PM	Tube furnace set to 0
12/6/2010	4:34:21 PM	H2 valve closed
12/6/2010	4:34:21 PM	BCl3 valve closed
12/6/2010	4:34:21 PM	PH3 valve closed
12/6/2010	4:34:21 PM	SiCl4 pre valve closed
12/6/2010	4:34:21 PM	SiCl4 post valve closed
12/6/2010	4:34:21 PM	Bubbler valve closed
12/6/2010	4:34:21 PM	Helium valve opened
12/6/2010	4:34:21 PM	Main Vac valve opened
12/6/2010	4:34:21 PM	Bypass valve opened
12/6/2010	4:34:21 PM	Helium MFC set to  100.000000
12/6/2010	4:34:21 PM	H2 MFC set to  0.000000
12/6/2010	4:34:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:34:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:34:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:34:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:34:21 PM	Tube furnace set to 0
12/6/2010	4:35:21 PM	Helium valve closed
12/6/2010	4:35:21 PM	H2 valve closed
12/6/2010	4:35:21 PM	BCl3 valve closed
12/6/2010	4:35:21 PM	PH3 valve closed
12/6/2010	4:35:21 PM	SiCl4 pre valve closed
12/6/2010	4:35:21 PM	SiCl4 post valve closed
12/6/2010	4:35:21 PM	Bubbler valve closed
12/6/2010	4:35:21 PM	Main Vac valve opened
12/6/2010	4:35:21 PM	Bypass valve opened
12/6/2010	4:35:21 PM	Helium MFC set to  0.000000
12/6/2010	4:35:21 PM	H2 MFC set to  0.000000
12/6/2010	4:35:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:35:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:35:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:35:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:35:21 PM	Tube furnace set to 0
12/6/2010	4:36:21 PM	H2 valve closed
12/6/2010	4:36:21 PM	BCl3 valve closed
12/6/2010	4:36:21 PM	PH3 valve closed
12/6/2010	4:36:21 PM	SiCl4 pre valve closed
12/6/2010	4:36:21 PM	SiCl4 post valve closed
12/6/2010	4:36:21 PM	Bubbler valve closed
12/6/2010	4:36:21 PM	Helium valve opened
12/6/2010	4:36:21 PM	Main Vac valve opened
12/6/2010	4:36:21 PM	Bypass valve opened
12/6/2010	4:36:21 PM	Helium MFC set to  100.000000
12/6/2010	4:36:21 PM	H2 MFC set to  0.000000
12/6/2010	4:36:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:36:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:36:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:36:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:36:21 PM	Tube furnace set to 0
12/6/2010	4:37:21 PM	Helium valve closed
12/6/2010	4:37:21 PM	H2 valve closed
12/6/2010	4:37:21 PM	BCl3 valve closed
12/6/2010	4:37:21 PM	PH3 valve closed
12/6/2010	4:37:21 PM	SiCl4 pre valve closed
12/6/2010	4:37:21 PM	SiCl4 post valve closed
12/6/2010	4:37:21 PM	Bubbler valve closed
12/6/2010	4:37:21 PM	Main Vac valve opened
12/6/2010	4:37:21 PM	Bypass valve opened
12/6/2010	4:37:21 PM	Helium MFC set to  0.000000
12/6/2010	4:37:21 PM	H2 MFC set to  0.000000
12/6/2010	4:37:21 PM	BCl3 MFC set to  0.000000
12/6/2010	4:37:21 PM	PHl3 MFC set to  0.000000
12/6/2010	4:37:21 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:37:21 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:37:22 PM	Tube furnace set to 0
12/6/2010	4:38:22 PM	H2 valve closed
12/6/2010	4:38:22 PM	BCl3 valve closed
12/6/2010	4:38:22 PM	PH3 valve closed
12/6/2010	4:38:22 PM	SiCl4 pre valve closed
12/6/2010	4:38:22 PM	SiCl4 post valve closed
12/6/2010	4:38:22 PM	Bubbler valve closed
12/6/2010	4:38:22 PM	Helium valve opened
12/6/2010	4:38:22 PM	Main Vac valve opened
12/6/2010	4:38:22 PM	Bypass valve opened
12/6/2010	4:38:22 PM	Helium MFC set to  100.000000
12/6/2010	4:38:22 PM	H2 MFC set to  0.000000
12/6/2010	4:38:22 PM	BCl3 MFC set to  0.000000
12/6/2010	4:38:22 PM	PHl3 MFC set to  0.000000
12/6/2010	4:38:22 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:38:22 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:38:22 PM	Tube furnace set to 0
12/6/2010	4:39:22 PM	Helium valve closed
12/6/2010	4:39:22 PM	H2 valve closed
12/6/2010	4:39:22 PM	BCl3 valve closed
12/6/2010	4:39:22 PM	PH3 valve closed
12/6/2010	4:39:22 PM	SiCl4 pre valve closed
12/6/2010	4:39:22 PM	SiCl4 post valve closed
12/6/2010	4:39:22 PM	Bubbler valve closed
12/6/2010	4:39:22 PM	Main Vac valve opened
12/6/2010	4:39:22 PM	Bypass valve opened
12/6/2010	4:39:22 PM	Helium MFC set to  0.000000
12/6/2010	4:39:22 PM	H2 MFC set to  0.000000
12/6/2010	4:39:22 PM	BCl3 MFC set to  0.000000
12/6/2010	4:39:22 PM	PHl3 MFC set to  0.000000
12/6/2010	4:39:22 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:39:22 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:39:22 PM	Tube furnace set to 0
12/6/2010	4:39:23 PM	Run finished at 4:39 PM
12/6/2010	4:39:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	4:43:18 PM	Recipe started at 4:43 PM
12/6/2010	4:43:18 PM	Helium valve closed
12/6/2010	4:43:18 PM	BCl3 valve closed
12/6/2010	4:43:18 PM	PH3 valve closed
12/6/2010	4:43:18 PM	SiCl4 pre valve closed
12/6/2010	4:43:18 PM	SiCl4 post valve closed
12/6/2010	4:43:18 PM	Main Vac valve closed
12/6/2010	4:43:18 PM	Bypass valve closed
12/6/2010	4:43:18 PM	Bubbler valve closed
12/6/2010	4:43:18 PM	H2 valve opened
12/6/2010	4:43:18 PM	Helium MFC set to  0.000000
12/6/2010	4:43:18 PM	H2 MFC set to  500.000000
12/6/2010	4:43:18 PM	BCl3 MFC set to  0.000000
12/6/2010	4:43:18 PM	PHl3 MFC set to  0.000000
12/6/2010	4:43:18 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:43:18 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:43:18 PM	Tube furnace set to 100
12/6/2010	4:43:37 PM	Run aborted at 4:43 PM
12/6/2010	4:43:37 PM	Helium valve closed
12/6/2010	4:43:37 PM	H2 valve closed
12/6/2010	4:43:37 PM	BCl3 valve closed
12/6/2010	4:43:37 PM	PH3 valve closed
12/6/2010	4:43:37 PM	SiCl4 pre valve closed
12/6/2010	4:43:37 PM	SiCl4 post valve closed
12/6/2010	4:43:37 PM	Bypass valve closed
12/6/2010	4:43:37 PM	Main Vac valve closed
12/6/2010	4:43:37 PM	Bubbler valve closed
12/6/2010	4:43:37 PM	Helium MFC set to  0.000000
12/6/2010	4:43:37 PM	H2 MFC set to  0.000000
12/6/2010	4:43:37 PM	BCl3 MFC set to  0.000000
12/6/2010	4:43:37 PM	PHl3 MFC set to  0.000000
12/6/2010	4:43:37 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:43:37 PM	Tube furnace set to 0
12/6/2010	4:43:41 PM	Bypass valve opened
12/6/2010	4:43:42 PM	Main Vac valve opened
12/6/2010	4:44:13 PM	Bypass valve closed
12/6/2010	4:44:14 PM	Main Vac valve closed
12/6/2010	4:44:32 PM	Recipe started at 4:44 PM
12/6/2010	4:44:32 PM	Helium valve closed
12/6/2010	4:44:32 PM	BCl3 valve closed
12/6/2010	4:44:32 PM	PH3 valve closed
12/6/2010	4:44:32 PM	SiCl4 pre valve closed
12/6/2010	4:44:32 PM	SiCl4 post valve closed
12/6/2010	4:44:32 PM	Main Vac valve closed
12/6/2010	4:44:32 PM	Bypass valve closed
12/6/2010	4:44:32 PM	Bubbler valve closed
12/6/2010	4:44:32 PM	H2 valve opened
12/6/2010	4:44:32 PM	Helium MFC set to  0.000000
12/6/2010	4:44:32 PM	H2 MFC set to  500.000000
12/6/2010	4:44:32 PM	BCl3 MFC set to  0.000000
12/6/2010	4:44:32 PM	PHl3 MFC set to  0.000000
12/6/2010	4:44:32 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:44:32 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:44:33 PM	Tube furnace set to 100
12/6/2010	4:45:51 PM	Helium valve closed
12/6/2010	4:45:51 PM	BCl3 valve closed
12/6/2010	4:45:51 PM	PH3 valve closed
12/6/2010	4:45:51 PM	SiCl4 pre valve closed
12/6/2010	4:45:51 PM	SiCl4 post valve closed
12/6/2010	4:45:51 PM	Main Vac valve closed
12/6/2010	4:45:51 PM	Bypass valve closed
12/6/2010	4:45:51 PM	H2 valve opened
12/6/2010	4:45:51 PM	Bubbler valve opened
12/6/2010	4:45:51 PM	Helium MFC set to  0.000000
12/6/2010	4:45:51 PM	H2 MFC set to  500.000000
12/6/2010	4:45:51 PM	BCl3 MFC set to  0.000000
12/6/2010	4:45:51 PM	PHl3 MFC set to  0.000000
12/6/2010	4:45:51 PM	SiCl4 MFC set to  0.000000
12/6/2010	4:45:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	4:45:51 PM	Tube furnace set to 1000
12/6/2010	5:05:51 PM	Helium valve closed
12/6/2010	5:05:51 PM	PH3 valve closed
12/6/2010	5:05:51 PM	Main Vac valve closed
12/6/2010	5:05:51 PM	Bypass valve closed
12/6/2010	5:05:51 PM	H2 valve opened
12/6/2010	5:05:51 PM	BCl3 valve opened
12/6/2010	5:05:51 PM	SiCl4 pre valve opened
12/6/2010	5:05:51 PM	SiCl4 post valve opened
12/6/2010	5:05:51 PM	Bubbler valve opened
12/6/2010	5:05:51 PM	Helium MFC set to  0.000000
12/6/2010	5:05:51 PM	H2 MFC set to  500.000000
12/6/2010	5:05:51 PM	BCl3 MFC set to  10.000000
12/6/2010	5:05:51 PM	PHl3 MFC set to  0.000000
12/6/2010	5:05:51 PM	SiCl4 MFC set to  50.000000
12/6/2010	5:05:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:05:51 PM	Tube furnace set to 1000
12/6/2010	5:17:51 PM	H2 valve closed
12/6/2010	5:17:51 PM	BCl3 valve closed
12/6/2010	5:17:51 PM	PH3 valve closed
12/6/2010	5:17:51 PM	SiCl4 pre valve closed
12/6/2010	5:17:51 PM	SiCl4 post valve closed
12/6/2010	5:17:51 PM	Main Vac valve closed
12/6/2010	5:17:51 PM	Bypass valve closed
12/6/2010	5:17:51 PM	Helium valve opened
12/6/2010	5:17:51 PM	Bubbler valve opened
12/6/2010	5:17:51 PM	Helium MFC set to  500.000000
12/6/2010	5:17:51 PM	H2 MFC set to  0.000000
12/6/2010	5:17:51 PM	BCl3 MFC set to  0.000000
12/6/2010	5:17:51 PM	PHl3 MFC set to  0.000000
12/6/2010	5:17:51 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:17:51 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:17:51 PM	Tube furnace set to 0
12/6/2010	5:37:51 PM	Helium valve closed
12/6/2010	5:37:51 PM	H2 valve closed
12/6/2010	5:37:51 PM	BCl3 valve closed
12/6/2010	5:37:51 PM	PH3 valve closed
12/6/2010	5:37:51 PM	SiCl4 pre valve closed
12/6/2010	5:37:51 PM	SiCl4 post valve closed
12/6/2010	5:37:51 PM	Main Vac valve closed
12/6/2010	5:37:51 PM	Bypass valve closed
12/6/2010	5:37:51 PM	Bubbler valve closed
12/6/2010	5:37:51 PM	Helium MFC set to  500.000000
12/6/2010	5:37:51 PM	H2 MFC set to  0.000000
12/6/2010	5:37:52 PM	BCl3 MFC set to  0.000000
12/6/2010	5:37:52 PM	PHl3 MFC set to  0.000000
12/6/2010	5:37:52 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:37:52 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:37:52 PM	Tube furnace set to 0
12/6/2010	5:37:52 PM	Run finished at 5:37 PM
12/6/2010	5:56:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	5:57:03 PM	Recipe started at 5:56 PM
12/6/2010	5:57:03 PM	Helium valve closed
12/6/2010	5:57:03 PM	H2 valve closed
12/6/2010	5:57:03 PM	BCl3 valve closed
12/6/2010	5:57:03 PM	PH3 valve closed
12/6/2010	5:57:03 PM	SiCl4 pre valve closed
12/6/2010	5:57:03 PM	SiCl4 post valve closed
12/6/2010	5:57:03 PM	Main Vac valve closed
12/6/2010	5:57:03 PM	Bubbler valve closed
12/6/2010	5:57:03 PM	Bypass valve opened
12/6/2010	5:57:03 PM	Helium MFC set to  0.000000
12/6/2010	5:57:03 PM	H2 MFC set to  0.000000
12/6/2010	5:57:03 PM	BCl3 MFC set to  0.000000
12/6/2010	5:57:03 PM	PHl3 MFC set to  0.000000
12/6/2010	5:57:03 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:57:03 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:57:03 PM	Tube furnace set to 0
12/6/2010	5:57:58 PM	Helium valve closed
12/6/2010	5:57:58 PM	H2 valve closed
12/6/2010	5:57:58 PM	BCl3 valve closed
12/6/2010	5:57:58 PM	PH3 valve closed
12/6/2010	5:57:58 PM	SiCl4 pre valve closed
12/6/2010	5:57:58 PM	SiCl4 post valve closed
12/6/2010	5:57:58 PM	Bubbler valve closed
12/6/2010	5:57:58 PM	Main Vac valve opened
12/6/2010	5:57:58 PM	Bypass valve opened
12/6/2010	5:57:58 PM	Helium MFC set to  0.000000
12/6/2010	5:57:58 PM	H2 MFC set to  0.000000
12/6/2010	5:57:58 PM	BCl3 MFC set to  0.000000
12/6/2010	5:57:58 PM	PHl3 MFC set to  0.000000
12/6/2010	5:57:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:57:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:57:58 PM	Tube furnace set to 0
12/6/2010	5:58:58 PM	H2 valve closed
12/6/2010	5:58:58 PM	BCl3 valve closed
12/6/2010	5:58:58 PM	PH3 valve closed
12/6/2010	5:58:58 PM	SiCl4 pre valve closed
12/6/2010	5:58:58 PM	SiCl4 post valve closed
12/6/2010	5:58:58 PM	Bubbler valve closed
12/6/2010	5:58:58 PM	Helium valve opened
12/6/2010	5:58:58 PM	Main Vac valve opened
12/6/2010	5:58:58 PM	Bypass valve opened
12/6/2010	5:58:58 PM	Helium MFC set to  100.000000
12/6/2010	5:58:58 PM	H2 MFC set to  0.000000
12/6/2010	5:58:58 PM	BCl3 MFC set to  0.000000
12/6/2010	5:58:58 PM	PHl3 MFC set to  0.000000
12/6/2010	5:58:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:58:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:58:58 PM	Tube furnace set to 0
12/6/2010	5:59:58 PM	Helium valve closed
12/6/2010	5:59:58 PM	H2 valve closed
12/6/2010	5:59:58 PM	BCl3 valve closed
12/6/2010	5:59:58 PM	PH3 valve closed
12/6/2010	5:59:58 PM	SiCl4 pre valve closed
12/6/2010	5:59:58 PM	SiCl4 post valve closed
12/6/2010	5:59:58 PM	Bubbler valve closed
12/6/2010	5:59:58 PM	Main Vac valve opened
12/6/2010	5:59:58 PM	Bypass valve opened
12/6/2010	5:59:58 PM	Helium MFC set to  0.000000
12/6/2010	5:59:58 PM	H2 MFC set to  0.000000
12/6/2010	5:59:58 PM	BCl3 MFC set to  0.000000
12/6/2010	5:59:58 PM	PHl3 MFC set to  0.000000
12/6/2010	5:59:58 PM	SiCl4 MFC set to  0.000000
12/6/2010	5:59:58 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	5:59:59 PM	Tube furnace set to 0
12/6/2010	6:00:59 PM	H2 valve closed
12/6/2010	6:00:59 PM	BCl3 valve closed
12/6/2010	6:00:59 PM	PH3 valve closed
12/6/2010	6:00:59 PM	SiCl4 pre valve closed
12/6/2010	6:00:59 PM	SiCl4 post valve closed
12/6/2010	6:00:59 PM	Bubbler valve closed
12/6/2010	6:00:59 PM	Helium valve opened
12/6/2010	6:00:59 PM	Main Vac valve opened
12/6/2010	6:00:59 PM	Bypass valve opened
12/6/2010	6:00:59 PM	Helium MFC set to  100.000000
12/6/2010	6:00:59 PM	H2 MFC set to  0.000000
12/6/2010	6:00:59 PM	BCl3 MFC set to  0.000000
12/6/2010	6:00:59 PM	PHl3 MFC set to  0.000000
12/6/2010	6:00:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:00:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:00:59 PM	Tube furnace set to 0
12/6/2010	6:01:59 PM	Helium valve closed
12/6/2010	6:01:59 PM	H2 valve closed
12/6/2010	6:01:59 PM	BCl3 valve closed
12/6/2010	6:01:59 PM	PH3 valve closed
12/6/2010	6:01:59 PM	SiCl4 pre valve closed
12/6/2010	6:01:59 PM	SiCl4 post valve closed
12/6/2010	6:01:59 PM	Bubbler valve closed
12/6/2010	6:01:59 PM	Main Vac valve opened
12/6/2010	6:01:59 PM	Bypass valve opened
12/6/2010	6:01:59 PM	Helium MFC set to  0.000000
12/6/2010	6:01:59 PM	H2 MFC set to  0.000000
12/6/2010	6:01:59 PM	BCl3 MFC set to  0.000000
12/6/2010	6:01:59 PM	PHl3 MFC set to  0.000000
12/6/2010	6:01:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:01:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:01:59 PM	Tube furnace set to 0
12/6/2010	6:02:59 PM	H2 valve closed
12/6/2010	6:02:59 PM	BCl3 valve closed
12/6/2010	6:02:59 PM	PH3 valve closed
12/6/2010	6:02:59 PM	SiCl4 pre valve closed
12/6/2010	6:02:59 PM	SiCl4 post valve closed
12/6/2010	6:02:59 PM	Bubbler valve closed
12/6/2010	6:02:59 PM	Helium valve opened
12/6/2010	6:02:59 PM	Main Vac valve opened
12/6/2010	6:02:59 PM	Bypass valve opened
12/6/2010	6:02:59 PM	Helium MFC set to  100.000000
12/6/2010	6:02:59 PM	H2 MFC set to  0.000000
12/6/2010	6:02:59 PM	BCl3 MFC set to  0.000000
12/6/2010	6:02:59 PM	PHl3 MFC set to  0.000000
12/6/2010	6:02:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:02:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:02:59 PM	Tube furnace set to 0
12/6/2010	6:03:59 PM	Helium valve closed
12/6/2010	6:03:59 PM	H2 valve closed
12/6/2010	6:03:59 PM	BCl3 valve closed
12/6/2010	6:03:59 PM	PH3 valve closed
12/6/2010	6:03:59 PM	SiCl4 pre valve closed
12/6/2010	6:03:59 PM	SiCl4 post valve closed
12/6/2010	6:03:59 PM	Bubbler valve closed
12/6/2010	6:03:59 PM	Main Vac valve opened
12/6/2010	6:03:59 PM	Bypass valve opened
12/6/2010	6:03:59 PM	Helium MFC set to  0.000000
12/6/2010	6:03:59 PM	H2 MFC set to  0.000000
12/6/2010	6:03:59 PM	BCl3 MFC set to  0.000000
12/6/2010	6:03:59 PM	PHl3 MFC set to  0.000000
12/6/2010	6:03:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:03:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:03:59 PM	Tube furnace set to 0
12/6/2010	6:04:59 PM	H2 valve closed
12/6/2010	6:04:59 PM	BCl3 valve closed
12/6/2010	6:04:59 PM	PH3 valve closed
12/6/2010	6:04:59 PM	SiCl4 pre valve closed
12/6/2010	6:04:59 PM	SiCl4 post valve closed
12/6/2010	6:04:59 PM	Bubbler valve closed
12/6/2010	6:04:59 PM	Helium valve opened
12/6/2010	6:04:59 PM	Main Vac valve opened
12/6/2010	6:04:59 PM	Bypass valve opened
12/6/2010	6:04:59 PM	Helium MFC set to  100.000000
12/6/2010	6:04:59 PM	H2 MFC set to  0.000000
12/6/2010	6:04:59 PM	BCl3 MFC set to  0.000000
12/6/2010	6:04:59 PM	PHl3 MFC set to  0.000000
12/6/2010	6:04:59 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:04:59 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:05:00 PM	Tube furnace set to 0
12/6/2010	6:06:00 PM	Helium valve closed
12/6/2010	6:06:00 PM	H2 valve closed
12/6/2010	6:06:00 PM	BCl3 valve closed
12/6/2010	6:06:00 PM	PH3 valve closed
12/6/2010	6:06:00 PM	SiCl4 pre valve closed
12/6/2010	6:06:00 PM	SiCl4 post valve closed
12/6/2010	6:06:00 PM	Bubbler valve closed
12/6/2010	6:06:00 PM	Main Vac valve opened
12/6/2010	6:06:00 PM	Bypass valve opened
12/6/2010	6:06:00 PM	Helium MFC set to  0.000000
12/6/2010	6:06:00 PM	H2 MFC set to  0.000000
12/6/2010	6:06:00 PM	BCl3 MFC set to  0.000000
12/6/2010	6:06:00 PM	PHl3 MFC set to  0.000000
12/6/2010	6:06:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:06:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:06:00 PM	Tube furnace set to 0
12/6/2010	6:07:00 PM	H2 valve closed
12/6/2010	6:07:00 PM	BCl3 valve closed
12/6/2010	6:07:00 PM	PH3 valve closed
12/6/2010	6:07:00 PM	SiCl4 pre valve closed
12/6/2010	6:07:00 PM	SiCl4 post valve closed
12/6/2010	6:07:00 PM	Bubbler valve closed
12/6/2010	6:07:00 PM	Helium valve opened
12/6/2010	6:07:00 PM	Main Vac valve opened
12/6/2010	6:07:00 PM	Bypass valve opened
12/6/2010	6:07:00 PM	Helium MFC set to  100.000000
12/6/2010	6:07:00 PM	H2 MFC set to  0.000000
12/6/2010	6:07:00 PM	BCl3 MFC set to  0.000000
12/6/2010	6:07:00 PM	PHl3 MFC set to  0.000000
12/6/2010	6:07:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:07:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:07:00 PM	Tube furnace set to 0
12/6/2010	6:08:00 PM	Helium valve closed
12/6/2010	6:08:00 PM	H2 valve closed
12/6/2010	6:08:00 PM	BCl3 valve closed
12/6/2010	6:08:00 PM	PH3 valve closed
12/6/2010	6:08:00 PM	SiCl4 pre valve closed
12/6/2010	6:08:00 PM	SiCl4 post valve closed
12/6/2010	6:08:00 PM	Bubbler valve closed
12/6/2010	6:08:00 PM	Main Vac valve opened
12/6/2010	6:08:00 PM	Bypass valve opened
12/6/2010	6:08:00 PM	Helium MFC set to  0.000000
12/6/2010	6:08:00 PM	H2 MFC set to  0.000000
12/6/2010	6:08:00 PM	BCl3 MFC set to  0.000000
12/6/2010	6:08:00 PM	PHl3 MFC set to  0.000000
12/6/2010	6:08:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:08:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:08:00 PM	Tube furnace set to 0
12/6/2010	6:09:00 PM	H2 valve closed
12/6/2010	6:09:00 PM	BCl3 valve closed
12/6/2010	6:09:00 PM	PH3 valve closed
12/6/2010	6:09:00 PM	SiCl4 pre valve closed
12/6/2010	6:09:00 PM	SiCl4 post valve closed
12/6/2010	6:09:00 PM	Bubbler valve closed
12/6/2010	6:09:00 PM	Helium valve opened
12/6/2010	6:09:00 PM	Main Vac valve opened
12/6/2010	6:09:00 PM	Bypass valve opened
12/6/2010	6:09:00 PM	Helium MFC set to  100.000000
12/6/2010	6:09:00 PM	H2 MFC set to  0.000000
12/6/2010	6:09:00 PM	BCl3 MFC set to  0.000000
12/6/2010	6:09:00 PM	PHl3 MFC set to  0.000000
12/6/2010	6:09:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:09:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:09:00 PM	Tube furnace set to 0
12/6/2010	6:10:00 PM	Helium valve closed
12/6/2010	6:10:00 PM	H2 valve closed
12/6/2010	6:10:00 PM	BCl3 valve closed
12/6/2010	6:10:00 PM	PH3 valve closed
12/6/2010	6:10:00 PM	SiCl4 pre valve closed
12/6/2010	6:10:00 PM	SiCl4 post valve closed
12/6/2010	6:10:00 PM	Bubbler valve closed
12/6/2010	6:10:00 PM	Main Vac valve opened
12/6/2010	6:10:00 PM	Bypass valve opened
12/6/2010	6:10:00 PM	Helium MFC set to  0.000000
12/6/2010	6:10:00 PM	H2 MFC set to  0.000000
12/6/2010	6:10:00 PM	BCl3 MFC set to  0.000000
12/6/2010	6:10:00 PM	PHl3 MFC set to  0.000000
12/6/2010	6:10:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:10:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:10:01 PM	Tube furnace set to 0
12/6/2010	6:11:01 PM	H2 valve closed
12/6/2010	6:11:01 PM	BCl3 valve closed
12/6/2010	6:11:01 PM	PH3 valve closed
12/6/2010	6:11:01 PM	SiCl4 pre valve closed
12/6/2010	6:11:01 PM	SiCl4 post valve closed
12/6/2010	6:11:01 PM	Bubbler valve closed
12/6/2010	6:11:01 PM	Helium valve opened
12/6/2010	6:11:01 PM	Main Vac valve opened
12/6/2010	6:11:01 PM	Bypass valve opened
12/6/2010	6:11:01 PM	Helium MFC set to  100.000000
12/6/2010	6:11:01 PM	H2 MFC set to  0.000000
12/6/2010	6:11:01 PM	BCl3 MFC set to  0.000000
12/6/2010	6:11:01 PM	PHl3 MFC set to  0.000000
12/6/2010	6:11:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:11:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:11:01 PM	Tube furnace set to 0
12/6/2010	6:12:01 PM	Helium valve closed
12/6/2010	6:12:01 PM	H2 valve closed
12/6/2010	6:12:01 PM	BCl3 valve closed
12/6/2010	6:12:01 PM	PH3 valve closed
12/6/2010	6:12:01 PM	SiCl4 pre valve closed
12/6/2010	6:12:01 PM	SiCl4 post valve closed
12/6/2010	6:12:01 PM	Bubbler valve closed
12/6/2010	6:12:01 PM	Main Vac valve opened
12/6/2010	6:12:01 PM	Bypass valve opened
12/6/2010	6:12:01 PM	Helium MFC set to  0.000000
12/6/2010	6:12:01 PM	H2 MFC set to  0.000000
12/6/2010	6:12:01 PM	BCl3 MFC set to  0.000000
12/6/2010	6:12:01 PM	PHl3 MFC set to  0.000000
12/6/2010	6:12:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:12:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:12:01 PM	Tube furnace set to 0
12/6/2010	6:13:01 PM	H2 valve closed
12/6/2010	6:13:01 PM	BCl3 valve closed
12/6/2010	6:13:01 PM	PH3 valve closed
12/6/2010	6:13:01 PM	SiCl4 pre valve closed
12/6/2010	6:13:01 PM	SiCl4 post valve closed
12/6/2010	6:13:01 PM	Bubbler valve closed
12/6/2010	6:13:01 PM	Helium valve opened
12/6/2010	6:13:01 PM	Main Vac valve opened
12/6/2010	6:13:01 PM	Bypass valve opened
12/6/2010	6:13:01 PM	Helium MFC set to  100.000000
12/6/2010	6:13:01 PM	H2 MFC set to  0.000000
12/6/2010	6:13:01 PM	BCl3 MFC set to  0.000000
12/6/2010	6:13:01 PM	PHl3 MFC set to  0.000000
12/6/2010	6:13:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:13:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:13:01 PM	Tube furnace set to 0
12/6/2010	6:14:01 PM	Helium valve closed
12/6/2010	6:14:01 PM	H2 valve closed
12/6/2010	6:14:01 PM	BCl3 valve closed
12/6/2010	6:14:01 PM	PH3 valve closed
12/6/2010	6:14:01 PM	SiCl4 pre valve closed
12/6/2010	6:14:01 PM	SiCl4 post valve closed
12/6/2010	6:14:01 PM	Bubbler valve closed
12/6/2010	6:14:01 PM	Main Vac valve opened
12/6/2010	6:14:01 PM	Bypass valve opened
12/6/2010	6:14:01 PM	Helium MFC set to  0.000000
12/6/2010	6:14:01 PM	H2 MFC set to  0.000000
12/6/2010	6:14:01 PM	BCl3 MFC set to  0.000000
12/6/2010	6:14:01 PM	PHl3 MFC set to  0.000000
12/6/2010	6:14:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:14:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:14:01 PM	Tube furnace set to 0
12/6/2010	6:15:01 PM	H2 valve closed
12/6/2010	6:15:01 PM	BCl3 valve closed
12/6/2010	6:15:01 PM	PH3 valve closed
12/6/2010	6:15:01 PM	SiCl4 pre valve closed
12/6/2010	6:15:01 PM	SiCl4 post valve closed
12/6/2010	6:15:01 PM	Bubbler valve closed
12/6/2010	6:15:01 PM	Helium valve opened
12/6/2010	6:15:01 PM	Main Vac valve opened
12/6/2010	6:15:01 PM	Bypass valve opened
12/6/2010	6:15:01 PM	Helium MFC set to  100.000000
12/6/2010	6:15:01 PM	H2 MFC set to  0.000000
12/6/2010	6:15:01 PM	BCl3 MFC set to  0.000000
12/6/2010	6:15:01 PM	PHl3 MFC set to  0.000000
12/6/2010	6:15:01 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:15:01 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:15:01 PM	Tube furnace set to 0
12/6/2010	6:16:02 PM	Helium valve closed
12/6/2010	6:16:02 PM	H2 valve closed
12/6/2010	6:16:02 PM	BCl3 valve closed
12/6/2010	6:16:02 PM	PH3 valve closed
12/6/2010	6:16:02 PM	SiCl4 pre valve closed
12/6/2010	6:16:02 PM	SiCl4 post valve closed
12/6/2010	6:16:02 PM	Bubbler valve closed
12/6/2010	6:16:02 PM	Main Vac valve opened
12/6/2010	6:16:02 PM	Bypass valve opened
12/6/2010	6:16:02 PM	Helium MFC set to  0.000000
12/6/2010	6:16:02 PM	H2 MFC set to  0.000000
12/6/2010	6:16:02 PM	BCl3 MFC set to  0.000000
12/6/2010	6:16:02 PM	PHl3 MFC set to  0.000000
12/6/2010	6:16:02 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:16:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:16:02 PM	Tube furnace set to 0
12/6/2010	6:17:02 PM	H2 valve closed
12/6/2010	6:17:02 PM	BCl3 valve closed
12/6/2010	6:17:02 PM	PH3 valve closed
12/6/2010	6:17:02 PM	SiCl4 pre valve closed
12/6/2010	6:17:02 PM	SiCl4 post valve closed
12/6/2010	6:17:02 PM	Bubbler valve closed
12/6/2010	6:17:02 PM	Helium valve opened
12/6/2010	6:17:02 PM	Main Vac valve opened
12/6/2010	6:17:02 PM	Bypass valve opened
12/6/2010	6:17:02 PM	Helium MFC set to  100.000000
12/6/2010	6:17:02 PM	H2 MFC set to  0.000000
12/6/2010	6:17:02 PM	BCl3 MFC set to  0.000000
12/6/2010	6:17:02 PM	PHl3 MFC set to  0.000000
12/6/2010	6:17:02 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:17:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:17:02 PM	Tube furnace set to 0
12/6/2010	6:18:02 PM	Helium valve closed
12/6/2010	6:18:02 PM	H2 valve closed
12/6/2010	6:18:02 PM	BCl3 valve closed
12/6/2010	6:18:02 PM	PH3 valve closed
12/6/2010	6:18:02 PM	SiCl4 pre valve closed
12/6/2010	6:18:02 PM	SiCl4 post valve closed
12/6/2010	6:18:02 PM	Bubbler valve closed
12/6/2010	6:18:02 PM	Main Vac valve opened
12/6/2010	6:18:02 PM	Bypass valve opened
12/6/2010	6:18:02 PM	Helium MFC set to  0.000000
12/6/2010	6:18:02 PM	H2 MFC set to  0.000000
12/6/2010	6:18:02 PM	BCl3 MFC set to  0.000000
12/6/2010	6:18:02 PM	PHl3 MFC set to  0.000000
12/6/2010	6:18:02 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:18:02 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:18:02 PM	Tube furnace set to 0
12/6/2010	6:18:03 PM	Run finished at 6:18 PM
12/6/2010	6:18:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/6/2010	6:18:37 PM	Bypass valve closed
12/6/2010	6:18:37 PM	Main Vac valve closed
12/6/2010	6:18:55 PM	Recipe started at 6:18 PM
12/6/2010	6:18:55 PM	Helium valve closed
12/6/2010	6:18:55 PM	BCl3 valve closed
12/6/2010	6:18:55 PM	PH3 valve closed
12/6/2010	6:18:55 PM	SiCl4 pre valve closed
12/6/2010	6:18:55 PM	SiCl4 post valve closed
12/6/2010	6:18:55 PM	Main Vac valve closed
12/6/2010	6:18:55 PM	Bypass valve closed
12/6/2010	6:18:55 PM	Bubbler valve closed
12/6/2010	6:18:55 PM	H2 valve opened
12/6/2010	6:18:55 PM	Helium MFC set to  0.000000
12/6/2010	6:18:55 PM	H2 MFC set to  500.000000
12/6/2010	6:18:55 PM	BCl3 MFC set to  0.000000
12/6/2010	6:18:55 PM	PHl3 MFC set to  0.000000
12/6/2010	6:18:55 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:18:55 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:18:55 PM	Tube furnace set to 100
12/6/2010	6:20:13 PM	Helium valve closed
12/6/2010	6:20:13 PM	BCl3 valve closed
12/6/2010	6:20:13 PM	PH3 valve closed
12/6/2010	6:20:13 PM	SiCl4 pre valve closed
12/6/2010	6:20:13 PM	SiCl4 post valve closed
12/6/2010	6:20:13 PM	Main Vac valve closed
12/6/2010	6:20:13 PM	Bypass valve closed
12/6/2010	6:20:13 PM	H2 valve opened
12/6/2010	6:20:13 PM	Bubbler valve opened
12/6/2010	6:20:13 PM	Helium MFC set to  0.000000
12/6/2010	6:20:13 PM	H2 MFC set to  500.000000
12/6/2010	6:20:13 PM	BCl3 MFC set to  0.000000
12/6/2010	6:20:13 PM	PHl3 MFC set to  0.000000
12/6/2010	6:20:13 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:20:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:20:13 PM	Tube furnace set to 1000
12/6/2010	6:40:13 PM	Helium valve closed
12/6/2010	6:40:13 PM	PH3 valve closed
12/6/2010	6:40:13 PM	Main Vac valve closed
12/6/2010	6:40:13 PM	Bypass valve closed
12/6/2010	6:40:13 PM	H2 valve opened
12/6/2010	6:40:13 PM	BCl3 valve opened
12/6/2010	6:40:13 PM	SiCl4 pre valve opened
12/6/2010	6:40:13 PM	SiCl4 post valve opened
12/6/2010	6:40:13 PM	Bubbler valve opened
12/6/2010	6:40:13 PM	Helium MFC set to  0.000000
12/6/2010	6:40:13 PM	H2 MFC set to  500.000000
12/6/2010	6:40:13 PM	BCl3 MFC set to  10.000000
12/6/2010	6:40:13 PM	PHl3 MFC set to  0.000000
12/6/2010	6:40:13 PM	SiCl4 MFC set to  50.000000
12/6/2010	6:40:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:40:13 PM	Tube furnace set to 1000
12/6/2010	6:52:13 PM	H2 valve closed
12/6/2010	6:52:13 PM	BCl3 valve closed
12/6/2010	6:52:13 PM	PH3 valve closed
12/6/2010	6:52:13 PM	SiCl4 pre valve closed
12/6/2010	6:52:13 PM	SiCl4 post valve closed
12/6/2010	6:52:13 PM	Main Vac valve closed
12/6/2010	6:52:13 PM	Bypass valve closed
12/6/2010	6:52:13 PM	Helium valve opened
12/6/2010	6:52:13 PM	Bubbler valve opened
12/6/2010	6:52:13 PM	Helium MFC set to  500.000000
12/6/2010	6:52:13 PM	H2 MFC set to  0.000000
12/6/2010	6:52:13 PM	BCl3 MFC set to  0.000000
12/6/2010	6:52:13 PM	PHl3 MFC set to  0.000000
12/6/2010	6:52:13 PM	SiCl4 MFC set to  0.000000
12/6/2010	6:52:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	6:52:13 PM	Tube furnace set to 0
12/6/2010	7:12:13 PM	Helium valve closed
12/6/2010	7:12:13 PM	H2 valve closed
12/6/2010	7:12:13 PM	BCl3 valve closed
12/6/2010	7:12:13 PM	PH3 valve closed
12/6/2010	7:12:13 PM	SiCl4 pre valve closed
12/6/2010	7:12:13 PM	SiCl4 post valve closed
12/6/2010	7:12:13 PM	Main Vac valve closed
12/6/2010	7:12:13 PM	Bypass valve closed
12/6/2010	7:12:13 PM	Bubbler valve closed
12/6/2010	7:12:13 PM	Helium MFC set to  500.000000
12/6/2010	7:12:13 PM	H2 MFC set to  0.000000
12/6/2010	7:12:13 PM	BCl3 MFC set to  0.000000
12/6/2010	7:12:13 PM	PHl3 MFC set to  0.000000
12/6/2010	7:12:13 PM	SiCl4 MFC set to  0.000000
12/6/2010	7:12:13 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	7:12:14 PM	Tube furnace set to 0
12/6/2010	7:12:14 PM	Run finished at 7:12 PM
12/6/2010	7:30:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	7:30:03 PM	Recipe started at 7:30 PM
12/6/2010	7:30:03 PM	H2 valve closed
12/6/2010	7:30:03 PM	BCl3 valve closed
12/6/2010	7:30:03 PM	PH3 valve closed
12/6/2010	7:30:03 PM	SiCl4 pre valve closed
12/6/2010	7:30:03 PM	SiCl4 post valve closed
12/6/2010	7:30:03 PM	Main Vac valve closed
12/6/2010	7:30:03 PM	Bypass valve closed
12/6/2010	7:30:03 PM	Bubbler valve closed
12/6/2010	7:30:03 PM	Helium valve opened
12/6/2010	7:30:03 PM	Helium MFC set to  500.000000
12/6/2010	7:30:03 PM	H2 MFC set to  0.000000
12/6/2010	7:30:03 PM	BCl3 MFC set to  0.000000
12/6/2010	7:30:03 PM	PHl3 MFC set to  0.000000
12/6/2010	7:30:03 PM	SiCl4 MFC set to  0.000000
12/6/2010	7:30:03 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	7:30:03 PM	Tube furnace set to 0
12/6/2010	7:30:09 PM	Helium valve closed
12/6/2010	7:30:09 PM	H2 valve closed
12/6/2010	7:30:09 PM	BCl3 valve closed
12/6/2010	7:30:09 PM	PH3 valve closed
12/6/2010	7:30:09 PM	SiCl4 pre valve closed
12/6/2010	7:30:09 PM	SiCl4 post valve closed
12/6/2010	7:30:09 PM	Main Vac valve closed
12/6/2010	7:30:09 PM	Bypass valve closed
12/6/2010	7:30:09 PM	Bubbler valve closed
12/6/2010	7:30:09 PM	Helium MFC set to  0.000000
12/6/2010	7:30:09 PM	H2 MFC set to  0.000000
12/6/2010	7:30:09 PM	BCl3 MFC set to  0.000000
12/6/2010	7:30:09 PM	PHl3 MFC set to  0.000000
12/6/2010	7:30:09 PM	SiCl4 MFC set to  0.000000
12/6/2010	7:30:09 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	7:30:09 PM	Tube furnace set to 0
12/6/2010	7:30:09 PM	Run finished at 7:30 PM
12/6/2010	7:30:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/6/2010	7:36:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/6/2010	7:36:09 PM	Recipe started at 7:36 PM
12/6/2010	7:36:09 PM	Helium valve closed
12/6/2010	7:36:09 PM	H2 valve closed
12/6/2010	7:36:09 PM	BCl3 valve closed
12/6/2010	7:36:09 PM	PH3 valve closed
12/6/2010	7:36:09 PM	SiCl4 pre valve closed
12/6/2010	7:36:09 PM	SiCl4 post valve closed
12/6/2010	7:36:09 PM	Main Vac valve closed
12/6/2010	7:36:09 PM	Bubbler valve closed
12/6/2010	7:36:09 PM	Bypass valve opened
12/6/2010	7:36:09 PM	Helium MFC set to  0.000000
12/6/2010	7:36:09 PM	H2 MFC set to  0.000000
12/6/2010	7:36:09 PM	BCl3 MFC set to  0.000000
12/6/2010	7:36:09 PM	PHl3 MFC set to  0.000000
12/6/2010	7:36:09 PM	SiCl4 MFC set to  0.000000
12/6/2010	7:36:09 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	7:36:09 PM	Tube furnace set to 0
12/6/2010	7:37:00 PM	Helium valve closed
12/6/2010	7:37:00 PM	H2 valve closed
12/6/2010	7:37:00 PM	BCl3 valve closed
12/6/2010	7:37:00 PM	PH3 valve closed
12/6/2010	7:37:00 PM	SiCl4 pre valve closed
12/6/2010	7:37:00 PM	SiCl4 post valve closed
12/6/2010	7:37:00 PM	Bubbler valve closed
12/6/2010	7:37:00 PM	Main Vac valve opened
12/6/2010	7:37:00 PM	Bypass valve opened
12/6/2010	7:37:00 PM	Helium MFC set to  0.000000
12/6/2010	7:37:00 PM	H2 MFC set to  0.000000
12/6/2010	7:37:00 PM	BCl3 MFC set to  0.000000
12/6/2010	7:37:00 PM	PHl3 MFC set to  0.000000
12/6/2010	7:37:00 PM	SiCl4 MFC set to  0.000000
12/6/2010	7:37:00 PM	Bypass solenoid MFC set to  0.000000
12/6/2010	7:37:00 PM	Tube furnace set to 0
12/6/2010	7:37:00 PM	Run finished at 7:37 PM
12/6/2010	7:37:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
